Uniform Electron Cyclotron Resonance Plasma Generation for Precise ULSI Patterning
1992 ◽
Vol 31
(Part 2, No. 6B)
◽
pp. L774-L776
◽
1995 ◽
Vol 13
(3)
◽
pp. 875-882
◽
1992 ◽
Vol 31
(Part 1, No. 12B)
◽
pp. 4343-4347
1995 ◽
Vol 13
(4)
◽
pp. 2105-2109
◽
1992 ◽
Vol 31
(Part 1, No. 12B)
◽
pp. 4348-4356
◽
1993 ◽
Vol 68
(4)
◽
pp. 575-582
◽
1997 ◽
Vol 15
(4)
◽
pp. 1951-1954
◽