Characterization of low‐resistivity indium oxide films by Auger electron spectroscopy, x‐ray photoelectron spectroscopy, and x‐ray diffraction and correlation between their properties, composition, and texture

1996 ◽  
Vol 14 (2) ◽  
pp. 293-298 ◽  
Author(s):  
J. I. Jeong ◽  
J. H. Moon ◽  
J. H. Hong ◽  
J.‐S. Kang ◽  
Y. Fukuda ◽  
...  
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