Epitaxial growth of ZnO on GaN/sapphire substrate by radio-frequency magnetron sputtering

Journal of Semiconductors ◽

10.1088/1674-4926/31/9/093001 ◽

2010 ◽

Vol 31 (9) ◽

pp. 093001 ◽

Author(s):

Yang Xiaoli ◽

Chen Nuofu ◽

Yin Zhigang ◽

Zhang Xingwang ◽

Li Yang ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Sapphire Substrate ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Epitaxial growth of ZnO thin films on R-plane sapphire substrate by radio frequency magnetron sputtering

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580437 ◽

1997 ◽

Vol 15 (3) ◽

pp. 1103-1107 ◽

Author(s):

Young Jin Kim ◽

Yoo Taek Kim ◽

Hyung Kook Yang ◽

Jong Chul Park ◽

Jung In Han ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Sapphire Substrate ◽

Radio Frequency Magnetron ◽

Zno Thin Films ◽

Radio Frequency Magnetron Sputtering

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Epitaxial growth of Cr2O3 thin film on Al2O3 (0001) substrate by radio frequency magnetron sputtering combined with rapid-thermal annealing

Thin Solid Films ◽

10.1016/j.tsf.2010.01.046 ◽

2010 ◽

Vol 518 (17) ◽

pp. 4813-4816 ◽

Author(s):

Sang-Yong Jeong ◽

Jin-Bok Lee ◽

Hyunseok Na ◽

Tae-Yeon Seong

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Epitaxial growth of β-FeSi2thin films on Si(111) substrates by radio frequency magnetron sputtering and their application to near-infrared photodetection

Japanese Journal of Applied Physics ◽

10.7567/jjap.55.06hc03 ◽

2016 ◽

Vol 55 (6S2) ◽

pp. 06HC03 ◽

Author(s):

Nathaporn Promros ◽

Ryuji Baba ◽

Motoki Takahara ◽

Tarek M. Mostafa ◽

Phongsaphak Sittimart ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Near Infrared ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Infrared Photodetection

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Epitaxial growth of n-type β-FeSi2thin films on p-type Si(111) substrates by radio-frequency magnetron sputtering and rectifying action of heterojunctions

Proc. Int. Conf. and Summer School on Advanced Silicide Technology 2014 ◽

10.7567/jjapcp.3.011102 ◽

2015 ◽

Author(s):

Tarek M. Mostafa ◽

Motoki Takahara ◽

Ryuji Baba ◽

Suguru Funasaki ◽

Mahmoud Shaban ◽

...

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

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Heteroepitaxial growth of Cu2ZnSnS4 thin film on sapphire substrate by radio frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.4867093 ◽

2014 ◽

Vol 104 (9) ◽

pp. 092103 ◽

Author(s):

Ning Song ◽

Yu Wang ◽

Yicong Hu ◽

Yidan Huang ◽

Wei Li ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Sapphire Substrate ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Heteroepitaxial Growth ◽

Cu2znsns4 Thin Film

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Epitaxial growth of Cu2ZnSnS4 thin film on Si by radio frequency magnetron sputtering

Applied Physics Letters ◽

10.1063/1.5136289 ◽

2020 ◽

Vol 116 (12) ◽

pp. 123901 ◽

Author(s):

Ning Song ◽

Martin A. Green ◽

Kaiwen Sun ◽

Yicong Hu ◽

Chang Yan ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Epitaxial Growth ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Cu2znsns4 Thin Film

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Effect of Plused Negative Bias on Nucleation and Morphological Evolution of ZnO Films Deposited by Reactive Radio-frequency Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2009.00602 ◽

2009 ◽

Vol 24 (3) ◽

pp. 602-606 ◽

Author(s):

Wei-Jia FU ◽

Zhi-Wen LIU ◽

Jian-Feng GU ◽

Ming LIU ◽

Qing-Yu ZHANG

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Morphological Evolution ◽

Radio Frequency Magnetron ◽

Zno Films ◽

Negative Bias ◽

Radio Frequency Magnetron Sputtering

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Effect of sputtering power on the properties of SiO2 films grown by radio frequency magnetron sputtering at room temperature

Optical and Quantum Electronics ◽

10.1007/s11082-020-02639-4 ◽

2021 ◽

Vol 53 (1) ◽

Author(s):

Changjiang Zhao ◽

Leran Zhao ◽

Juncheng Liu ◽

Zhigang Liu ◽

Yan Chen

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Sputtering Power

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Mechanical, tribological, anti-corrosion and anti-glass sticking properties of high-entropy TaNbSiZrCr carbide coatings prepared using radio-frequency magnetron sputtering

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2021.124741 ◽

2021 ◽

pp. 124741

Author(s):

W.H. Kao ◽

Y.L. Su ◽

J.H. Horng ◽

W.C. Wu

Keyword(s):

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

High Entropy ◽

Carbide Coatings

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Nickel telluride vertically aligned thin film by radio-frequency magnetron sputtering for hydrogen evolution reaction

APL Materials ◽

10.1063/5.0024588 ◽

2020 ◽

Vol 8 (12) ◽

pp. 121104

Author(s):

Jeonghyeon Oh ◽

Ho Jun Park ◽

Arindam Bala ◽

Hee-Soo Kim ◽

Na Liu ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Hydrogen Evolution ◽

Hydrogen Evolution Reaction ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Vertically Aligned

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