Preparation of high quality RuO2 electrodes for high dielectric thin films by low pressure metal organic chemical vapor deposition
1998 ◽
Vol 16
(5)
◽
pp. 2768-2771
◽
2000 ◽
Vol 30
(1-4)
◽
pp. 45-52
◽
2004 ◽
Vol 110
(1)
◽
pp. 34-37
◽
2003 ◽
Vol 42
(Part 1, No. 5A)
◽
pp. 2839-2842
◽