Wide range temperature dependence of reflection high-energy electron diffraction rocking curve from a Si(111)7×7 surface

2000 ◽  
Vol 18 (3) ◽  
pp. 968-971 ◽  
Author(s):  
Y. Fukaya ◽  
K. Nakamura ◽  
Y. Shigeta
Keyword(s):  
Electron Diffraction ◽  
Temperature Dependence ◽  
High Energy ◽  
Energy Electron ◽  
High Energy Electron ◽  
Rocking Curve ◽  
Wide Range

STUDY OF STRUCTURE CHANGES ON THESiSURFACES USING REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION

2004 ◽  
Vol 18 (03) ◽  
pp. 289-316 ◽  
Author(s):  
Y. SHIGETA ◽  
Y. FUKAYA
Keyword(s):  
Electron Diffraction ◽  
Surface Segregation ◽  
Film Growth ◽  
High Energy ◽  
Structure Change ◽  
Energy Electron ◽  
Dynamical Structure ◽  
High Energy Electron ◽  
Wide Range ◽  
Surface Structure Change

In order to investigate surface structure change due to phase transition, surface melting, surface segregation and thin film growth, we have developed a new system for reflection high-energy electron diffraction (RHEED) with two pairs of magnetic coils to measure rocking curves in short time. This system is the most suitable tool to determine the structure change with temperature in a wide range, and we studied the dynamical structure change during film growth of Si on Si (111) and the phase transitions of Si (111) and Si (100) surfaces at high temperature.

Sign in / Sign up

Export Citation Format

Share Document