Ion beam synthesis of cobalt disilicide using focused ion beam implantation

1998 ◽  
Vol 16 (4) ◽  
pp. 2574 ◽  
Author(s):  
J. Teichert
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Cobalt Disilicide ◽  
Ion Beam Implantation ◽  
Ion Beam Synthesis

Investigation of dwell-time effects on the cobalt disilicide formation using focused ion beam implantation

1998 ◽  
Vol 41-42 ◽  
pp. 233-236 ◽  
Author(s):  
S. Hausmann ◽  
L. Bischoff ◽  
J. Teichert ◽  
D. Grambole ◽  
F. Herrmann ◽  
...  
Keyword(s):  
Dwell Time ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cobalt Disilicide ◽  
Time Effects ◽  
Ion Beam Implantation

Dwell-time related effects in focused ion beam synthesis of cobalt disilicide

2000 ◽  
Vol 87 (1) ◽  
pp. 57-62 ◽  
Author(s):  
Stephan Hausmann ◽  
Lothar Bischoff ◽  
Jochen Teichert ◽  
Matthias Voelskow ◽  
Wolfhard Möller
Keyword(s):  
Dwell Time ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cobalt Disilicide ◽  
Ion Beam Synthesis

Dwell-time effects in focused ion beam synthesis of cobalt disilicide: reflectivity measurements

1999 ◽  
Vol 148 (1-4) ◽  
pp. 610-614 ◽  
Author(s):  
Stephan Hausmann ◽  
Lothar Bischoff ◽  
Matthias Voelskow ◽  
Jochen Teichert ◽  
Wolfhard Möller ◽  
...  
Keyword(s):  
Dwell Time ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cobalt Disilicide ◽  
Time Effects ◽  
Ion Beam Synthesis

Dose rate effects in focused ion beam synthesis of cobalt disilicide

1998 ◽  
Vol 72 (21) ◽  
pp. 2719-2721 ◽  
Author(s):  
Stephan Hausmann ◽  
Lothar Bischoff ◽  
Jochen Teichert ◽  
Matthias Voelskow ◽  
Dieter Grambole ◽  
...  
Keyword(s):  
Dose Rate ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Cobalt Disilicide ◽  
Dose Rate Effects ◽  
Rate Effects ◽  
Ion Beam Synthesis

RBS and channeling analysis of cobalt disilicide layers produced by focused ion beam implantation

Vacuum ◽  
1998 ◽  
Vol 51 (2) ◽  
pp. 261-266 ◽  
Author(s):  
J Teichert ◽  
M Voelskow ◽  
L Bischoff ◽  
S Hausmann
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Cobalt Disilicide ◽  
Ion Beam Implantation

Conductance Oscillations in Hopping Conduction Systems Fabricated by Focused Ion Beam Implantation

1997 ◽  
Vol 36 (Part 1, No. 6B) ◽  
pp. 4046-4048 ◽  
Author(s):  
Hiroki Kondo ◽  
Hirotaka Iwano ◽  
Osamu Nakatsuka ◽  
Kazutaka Kaga ◽  
Shigeaki Zaima ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Hopping Conduction ◽  
Ion Beam Implantation
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