Use of two beam energies in secondary ion mass spectrometry analysis of shallow implants: Resolution-matched profiling

Author(s):  
G. A. Cooke ◽  
T. J. Ormsby ◽  
M. G. Dowsett ◽  
C. Parry ◽  
A. Murrell ◽  
...  
2015 ◽  
Vol 87 (15) ◽  
pp. 7795-7802 ◽  
Author(s):  
Rainer Kassenböhmer ◽  
Felix Draude ◽  
Martin Körsgen ◽  
Andreas Pelster ◽  
Heinrich F. Arlinghaus

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