Determination of pore size distribution in thin films by ellipsometric porosimetry

2000 ◽  
Vol 18 (3) ◽  
pp. 1385 ◽  
Author(s):  
M. R. Baklanov ◽  
K. P. Mogilnikov ◽  
V. G. Polovinkin ◽  
F. N. Dultsev
Keyword(s):  
Thin Films ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Ellipsometric Porosimetry

scholarly journals Determination of pore-size distribution in low-dielectric thin films

2000 ◽  
Vol 76 (10) ◽  
pp. 1282-1284 ◽  
Author(s):  
D. W. Gidley ◽  
W. E. Frieze ◽  
T. L. Dull ◽  
J. Sun ◽  
A. F. Yee ◽  
...  
Keyword(s):  
Thin Films ◽  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Dielectric Thin Films ◽  
Low Dielectric

Improved design and protocol for evapoporometry determination of the pore-size distribution

2015 ◽  
Vol 496 ◽  
pp. 334-343 ◽  
Author(s):  
Ebrahim Akhondi ◽  
Farhad Zamani ◽  
Jia Wei Chew ◽  
William B. Krantz ◽  
Anthony G. Fane
Keyword(s):  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Improved Design

Characterisation of Low-K Dielectric Films by Ellipsometric Porosimetry

2000 ◽  
Vol 612 ◽  
Author(s):  
M.R. Baklanov ◽  
K.P. Mogilnikov
Keyword(s):  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution ◽  
Surface Area ◽  
Average Pore Size ◽  
Dielectric Films ◽  
Swelling Properties ◽  
Small Surface ◽  
Ellipsometric Porosimetry ◽  
Low K

AbstractEllipsometric porosimetry (EP) is a simple and effective method for the characterization of the porosity (volume of both open and close pores), average pore size, specific surface area and pore size distribution (PSD) in thin porous films deposited on top of any smooth solid substrat e. Because a laser probe is used, small surface area can be analyzed. Therefore, EP can be used on patterned wafers and it is compatible with microelectronic technology. This method is a new version of adsorption (BET) porosimetry. In situ ellipsometry is used to determine the amount of adsorptive which adsorbed/condensed in the film. Change in refractive index is used to calculate of the quantity of adsorptive present in the film. EP also allows the study of thermal stability, adsorption and swelling properties of low-K dielectric films. Room temperature EP based on the adsorption of vapor of some suitable organic solvents and method of calculation of porosity and PSD is discussed. Examination of the validity of Gurvitsch rule for various organic adsorptives (toluene, heptane, carbon tetrachloride and isopropyl alcohol) has been carried out to assess the reliability of measurements of pore size distribution by the ellipsometric porosimetry.

Determination of pore size distribution by SETARAM DSC 101 (thermoporometry)

1981 ◽  
Vol 49 (1) ◽  
pp. 49-52 ◽  
Author(s):  
M. Brun ◽  
J.F. Quinson ◽  
L. Benoist
Keyword(s):  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution

Determination of pore size distribution of porcelain samples using water thermoporometry

2019 ◽  
Author(s):  
Anton Trník ◽  
Omar Al-Shantir ◽  
Magdaléna Doleželová ◽  
Jiří Maděra ◽  
Zuzana Hlaváčová
Keyword(s):  
Pore Size Distribution ◽  
Pore Size ◽  
Size Distribution
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