Efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks
2022 ◽
Vol 40
(1)
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pp. 012802
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2019 ◽
Vol 28
(4)
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pp. 045003
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2001 ◽
Vol 290-293
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pp. 1030-1035
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2004 ◽
Vol 76
(1-2)
◽
pp. 21-54
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2003 ◽
Vol 66-68
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pp. 413-417
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