<title>Applicability of fiber optic sensors to the detection of surface acoustic waves on metals</title>

The actuation technique of a surface acoustic wave motor with nanometer scale linear motion was experimentally investigated in this study. The surface acoustic wave motor comprised a stator made of a Y+128° cut, X-propagation lithium niobate substrate with silicon sliders and an array of pillar projections manufactured using semiconductor fabrication techniques. Two sets of interdigital transducers deposited on the substrate were used to generate Rayleigh waves with a driving frequency of up to 9.7 MHz. The surface acoustic wave motor was driven by friction exerted on the contact area between the slider and the surface acoustic waves in a retrogressive elliptical locus. The stepping motion of the surface acoustic wave motor was measured directly using a fiber-optic Michelson interferometer through demodulation with a digital signal processing method. A displacement of several nanometers was achieved at each step during the experiment.

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Fiber-optic sensor for surface acoustic waves

10.1364/ofc.1982.thgg5 ◽

1982 ◽

Cited By ~ 1

Author(s):

J. E. Bowers ◽

R. L. Jungerman ◽

G. S. Kino

Keyword(s):

Acoustic Waves ◽

Fiber Optic ◽

Surface Acoustic Waves ◽

Fiber Optic Sensor ◽

Optic Sensor

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Non-contact detection of laser-generated surface acoustic waves using fiber optic Sagnac interferometer

Ultrasonics ◽

10.1016/s0041-624x(02)00214-7 ◽

2002 ◽

Vol 40 (1-8) ◽

pp. 803-807 ◽

Cited By ~ 10

Author(s):

Tae Seong Jang ◽

Jung Ju Lee ◽

Dong Jin Yoon ◽

Seung Seok Lee

Keyword(s):

Acoustic Waves ◽

Fiber Optic ◽

Surface Acoustic Waves ◽

Contact Detection ◽

Sagnac Interferometer

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Characterization of RF Sputtered ZnO Piezoelectric Films Using Transmission Electron Microscope

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100114050 ◽

1975 ◽

Vol 33 ◽

pp. 86-87

Author(s):

Kemining W. Yeh ◽

Richard S. Muller ◽

Wei-Kuo Wu ◽

Jack Washburn

Keyword(s):

Integrated Circuit ◽

Acoustic Waves ◽

New Technology ◽

Surface Acoustic Waves ◽

Electromechanical Properties ◽

Leading Role ◽

Saw Devices ◽

Transmission Electron ◽

High Degree

Considerable and continuing interest has been shown in the thin film transducer fabrication for surface acoustic waves (SAW) in the past few years. Due to the high degree of miniaturization, compatibility with silicon integrated circuit technology, simplicity and ease of design, this new technology has played an important role in the design of new devices for communications and signal processing. Among the commonly used piezoelectric thin films, ZnO generally yields superior electromechanical properties and is expected to play a leading role in the development of SAW devices.

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