Near-field optical microscopy characterization of IC metrology
Ricardo Toledo-Crow
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Bruce W. Smith
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Jon K. Rogers
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Mehdi Vaez-Iravani
2020 ◽
Vol 3
(2)
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pp. 1250-1262
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Stefan G. Stanciu
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Denis E. Tranca
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Laura Pastorino
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Stefania Boi
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Young Min Song
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...
Johanna Trägårdh
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Henkjan Gersen
Ildar Salakhutdinov
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Kristjan Leosson
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Thomas Nikolajsen
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Sergey I.. Bozhevolnyi
Hao Wang
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Changjun Liao
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Guanghan Fan
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Song-Hao Liu
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Yangzhe Wu
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...
2007 ◽
Vol 78
(5)
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pp. 053712
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Nicholas E. Dickenson
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Elizabeth S. Erickson
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Olivia L. Mooren
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Robert C. Dunn
2001 ◽
Vol 40
(28)
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pp. 5040
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Gregor Schürmann
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Wilfried Noell
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Urs Staufer
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Nico F. de Rooij
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Rolf Eckert
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...
Guangwei Yuan
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Matthew D. Stephens
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David S. Dandy
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Kevin L. Lear
2005 ◽
Vol 87
(19)
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pp. 191107
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Guangwei Yuan
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Kevin L. Lear
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Matthew D. Stephens
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David S. Dandy
2008 ◽
Vol 23
(4)
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pp. 438-443
Deqiang Ma
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R. Douglas Carter
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David Haefner
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Aristide Dogariu
1994 ◽
Vol 75
(6)
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pp. 2753-2756
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D. J. Butler
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K. A. Nugent
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A. Roberts