An MEMS optical fiber pressure sensor fabricated by Au-Au thermal-compression bonding

Author(s):  
Xue Wang ◽  
Shuang Wang ◽  
Junfeng Jiang ◽  
Kun Liu ◽  
Mengnan Xiao ◽  
...  
AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025038
Author(s):  
Lang Bai ◽  
Gang Zheng ◽  
Bin Sun ◽  
Xiongxing Zhang ◽  
Qiming Sheng ◽  
...  

2009 ◽  
Vol 74 ◽  
pp. 149-152
Author(s):  
X.M. Zhang ◽  
M. Yu ◽  
Silas Nesson ◽  
H. Bae ◽  
A. Christian ◽  
...  

This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 μm/kPa and a resolution of 0.17 kPa.


Micromachines ◽  
2019 ◽  
Vol 10 (11) ◽  
pp. 717 ◽  
Author(s):  
Xin Cheng ◽  
Yi Liu ◽  
Changyuan Yu

This paper presents a high sensitivity gas pressure sensor with benzyl-dimethylketal (BDK)-doped polymer optical fiber Bragg grating (POFBG), whose sensitivity is up to 8.12 pm/kPa and 12.12 pm/kPa in positive and negative pressure atmosphere, respectively. The high sensitivity can be explained by its porous chemical structure. The stability and response behavior under air pressure atmosphere has also been investigated. The new understanding of the air pressure response principle and sensitivity difference for the presented sensor can be a worthy reference.


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