Phase measuring method and error compensation in 3D profile measurement

Author(s):  
Yan Zhang ◽  
Zili Zhang ◽  
Yueqiang Li ◽  
Weihu Zhou ◽  
Yang He ◽  
...  
2013 ◽  
Vol 677 ◽  
pp. 400-405
Author(s):  
Yi Guang Gu ◽  
Xiao Ping Lou

In order to realize the rapid and precise 3D profile measurement of workpieces with tiny-dimension characteristics, optical double-triangulation is studied. The measuring accuracy is affected by many factors such as system structure, surface characteristic and the circumstance. It is improved in the aspects of system structure and calibration in this paper. Two cameras are adopted to reduce the measuring dead area and eliminate the impact of the shadow caused by the object’s surface incline. The least-square curving fitting method combined with appropriate error compensation is selected according to analyses and comparisons of various calibration approaches. Experimental results are illustrated to verify the effectiveness of the measuring principle and the reliability of this measuring system.


Author(s):  
Chao Xing ◽  
Junhui Huang ◽  
Zhao Wang ◽  
Jianmin Gao

Abstract It is a challenge to improve the accuracy of 3D profile measurement based on binary coded structured light for complex surfaces. A new method of weighted fusion with multi-system is presented to reduce the measurement errors due to the stripe grayscale asymmetry, which is based on the analysis of stripe center deviation related to surface normal and the directions of incident and reflected rays. First, the stripe center deviation model is established according to the geometric relationship between the stripe center deviation, the incident and reflected angles at any measured point. The influence of each variable on stripe center deviation is analyzed, and three subsystems are formed by a binocular structured light framework to achieve multiple measurements based on the influence regularity. Then in order to improve the measurement accuracy, different weights are assigned to the measured point in different subsystems according to the stripe center deviation model and its relationship with measurement error, and the weighted data from different subsystems are fused. Experiments are carried out to validate the presented method, and the experimental results demonstrate that it effectively improves the measurement accuracy of complex surfaces and measurement accuracy is improved by about 27% compared with the conventional method.


2010 ◽  
Vol 37-38 ◽  
pp. 773-782
Author(s):  
Hao Huang ◽  
Xiang Yang Lei ◽  
Qiao Xu ◽  
Yin Biao Guo ◽  
Wei Luo

Grinding is a processing method that involves duplicating shape accuracy, so the shape accuracy of the grinding wheel plays a crucial role in machining accuracy. However, this accuracy is difficult to obtain. This paper describes an on-machine wheel profile measuring method that uses a non-contact displacement sensor to obtain the shape accuracy of an arc grinding wheel in a 3-axis aspheric surface grinding machine. This method involves data processing with object radius confined filtering, as well as evaluation using the methods of fitting residual error, measurement uncertainty, and machining result simulation. To verify the feasibility of this measuring method, experiments were performed using two diamond grinding wheels (FEPA D91 with grit size 75-90 μm, and FEPA D15 with grit size 10-25 μm). The experimental results indicate that the method is accurate enough to give the arc grinding wheel profile measurement, while the measuring uncertainty is of the same order of magnitude as the grit size (that is, tens of μm). Moreover, the simulation of the grinding effect with wheel profile measurement data can derive the relationship between the wheel profile error and the machining form error, and can be used to instruct the truing time determination for precision grinding.


2012 ◽  
Vol 50 (9) ◽  
pp. 1274-1280 ◽  
Author(s):  
Jing Xu ◽  
Shaoli Liu ◽  
An Wan ◽  
Bingtuan Gao ◽  
Qiang Yi ◽  
...  

Measurement ◽  
1997 ◽  
Vol 20 (2) ◽  
pp. 129-134 ◽  
Author(s):  
R. Furutani ◽  
H. Asano ◽  
K. Takamasu ◽  
S. Ozono

2010 ◽  
Vol 447-448 ◽  
pp. 604-608 ◽  
Author(s):  
Mu Zheng Xiao ◽  
Satomi Jujo ◽  
Satoru Takahashi ◽  
Kiyoshi Takamasu

Large aspheric mirrors with diameter over 300 millimeters with high surface accuracy are wildly used in many areas such as astronomical telescopes. Interferometers are widely used in profile measurement of optical flat and sphere. However, standard reference aspheric surface which is necessary for this method is difficult to make. Scanning defletometry based on ESAD (Extended Shear Angle Difference) is used to measure ultra-precise large near-flat and slight curved optical surface with the accuracy of sub-nanometer. However, it is not possible for it to measure aspheric surface because of the limitation of the measuring range of autocollimators. We proposed a new measuring method to scan the surface of a large aspheric optical surface using autocollimator with rotatable optical devices fixed on linear motion stage. To eliminate the influence of the pitching error of the scanning stage, we use two mirrors reflecting laser comes from autocollimator, which have the same effect with a pentaprism used in ESAD. To enlarge the measuring range of the autocollimator, we use a rotatable mirror to fit the changes of the slope of the mirror surface under measurement. The error analysis of the method is done. Measurement of an optical flat mirror and a sphere mirror with diameter of 50 mm and biggest slope of 6000 arc-second are done. The rotatable optical devices that we designed are proved effective on eliminating the pitching error of the moving stage.


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