To achieve the goal of processing large diameter and ultra-smooth optical components, the control system of the area-contact magnetorheological finishing machine is introduced. The system includes motion control systems, structural adjustment systems, detection systems and alarm systems. PLC, the core of the system, is used to data collection, input and output control, process control and so on. The touch screen as the man-machine interface is simple and intuitive, easily to operate. This paper describes the algorithms of this control system and introduces the design of the hardware and software of the system. This control system have a stability performance, strong anti-interference ability. The result shows that the magnetorheological finishing machine could processφ300mm optical components the optical components, radius range of optical components is -∞≤R-30 or 30≤R≤∞, and the surface roughness less than 1nm.
Developing magnetorheological finishing (MRF) technology for the manufacture of large-aperture optics in megajoule class laser systems
