Polishing parameters of magnetorheological finishing for high precision optical components

2013 ◽  
Vol 25 (9) ◽  
pp. 2281-2286
Author(s):  
秦北志 Qin Beizhi ◽  
杨李茗 Yang Liming ◽  
朱日宏 Zhu Rihong ◽  
侯晶 Hou Jing ◽  
袁志刚 Yuan Zhigang ◽  
...  
2010 ◽  
Vol 438 ◽  
pp. 65-72 ◽  
Author(s):  
Andreas Mehner ◽  
Ju An Dong ◽  
Timo Hoja ◽  
Torsten Prenzel ◽  
Yildirim Mutlugünes ◽  
...  

The demand for high precision optical elements as micro lens arrays for displays increases continually. Economic mass production of such optical elements is done by replication with high precision optical molds. A new approach for manufacturing such molds was realized by diamond machinable and wear resistant sol-gel coatings. Crack free silica based hybrid coatings from base catalyzed sols from tetraethylorthosilicate (TEOS: Si(OC2H5)4) and methyltriethoxysilane (MTES: Si(CH3)(OC2H5)3) precursors were deposited onto pre-machined steel molds by spin coating process followed by a heat treatment at temperatures up to 800°C. Crack-free multilayer coatings with a total thickness of up to 18 µm were achieved. Micro-machining of these coatings was accomplished by high precision fly cutting with diamond tools. Molds with micro-structured coatings were successfully tested for injection molding of PMMA optical components. The wear resistance of the coatings was successfully tested by injection molding of 1000 PMMA lenses. Hardness and elastic modulus of the coatings were measured by nano indentation. The chemical composition was measured by X-ray photo electron spectroscopy (XPS) as a function of the sol-gel processing parameters.


2013 ◽  
Vol 552 ◽  
pp. 234-237
Author(s):  
Zhi Li Chen ◽  
Yong Gang An ◽  
Zhao Shi Zhang

To achieve the goal of processing large diameter and ultra-smooth optical components, the control system of the area-contact magnetorheological finishing machine is introduced. The system includes motion control systems, structural adjustment systems, detection systems and alarm systems. PLC, the core of the system, is used to data collection, input and output control, process control and so on. The touch screen as the man-machine interface is simple and intuitive, easily to operate. This paper describes the algorithms of this control system and introduces the design of the hardware and software of the system. This control system have a stability performance, strong anti-interference ability. The result shows that the magnetorheological finishing machine could processφ300mm optical components the optical components, radius range of optical components is -∞≤R-30 or 30≤R≤∞, and the surface roughness less than 1nm.


Author(s):  
Vladimir A. GORSHKOV ◽  
Alexey S. SAVELYEV ◽  
Artem S. NEVROV ◽  
Aleksandra V. SMIRNOVA

The paper reviews advanced process for manufacturing high-precision optical components used in space-based electrooptic systems for scientific research and Earth remote sensing. It presents an integrated process for automatic shaping (TESAF) of aspheric surfaces, including off-axis surfaces, of optical elements for electrooptic systems. This paper discusses various methods for shaping optical parts with virtually any degree of asphericity and various values of the off-axis parameter (off-axis aspherics) achieving surface shape precision to within λ/60…λ/80 (λ = 0.6328 micron) by the standard deviation criteria. The paper also presents the newly developed off-axis collimators, designed to shape a reference wavefront within a broad spectral range from ultraviolet to infrared radiation. In particular, a mirror collimator with an adaptive off-axis mirror that is capable of changing the wavefront that is being formed in order to obtain the response function of the electrooptical system under study. Optical systems built using the TESAF process are already successfully used. Key words: surface shaping, aspheric surface, surface interferogram, standard deviation.


2015 ◽  
Author(s):  
A. Schleunitz ◽  
J. J. Klein ◽  
R. Houbertz ◽  
M. Vogler ◽  
G. Gruetzner

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