Femtosecond laser micro-structuring of air-disk mirrors in glass for out-of-plane waveguide coupling in silicon photonic packaging
Keyword(s):
2005 ◽
Vol 248
(1-4)
◽
pp. 213-217
◽
2014 ◽
Vol 20
(4)
◽
pp. 171-180
◽
Keyword(s):
2019 ◽
Vol 1
(4)
◽
pp. 045002
◽
2017 ◽
Vol 35
(4)
◽
pp. 588-595
◽
Keyword(s):
2015 ◽
Vol 353
◽
pp. 600-607
◽
2011 ◽
Vol 21
(7)
◽
pp. 075018
◽