Characterization of Mo/B 4 C soft x-ray multilayer mirrors for 7.3- to 8.0-nm radiation

1998 ◽  
Author(s):  
Junxia Lu ◽  
Yueying Ma ◽  
Shu Pei ◽  
Jianlin Cao ◽  
Xingdan Chen
Keyword(s):  
1995 ◽  
Vol 405 ◽  
Author(s):  
P. Boher ◽  
J. L. Stehle

AbstractSpectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).


1995 ◽  
Vol 406 ◽  
Author(s):  
P. Boher ◽  
J. L. Stehle

AbstractMSpectroscopic Ellipsometry (SE) and Grazing X-ray Reflectance (GXR) techniques are applied on different III-V epitaxial structures in order to extract accurately their structural information. Thickness information are obtained directly from Fourier transformation of the GXR spectra and confirmed by simulation of the reflectance curve. Compositions are deduced from SE regression using GXR thickness as input values. Examples on monolayer and bilayer structures are first remembered. Then the potentiality of the method is demonstrated to more complex systems (multilayer mirrors and HEMT structures).


1999 ◽  
Vol 69 (6) ◽  
pp. 641-647 ◽  
Author(s):  
H.L. Bai ◽  
E.Y. Jiang ◽  
P. Wu ◽  
Z.D. Lou ◽  
Y. Wang ◽  
...  

Vacuum ◽  
2009 ◽  
Vol 84 (1) ◽  
pp. 19-25 ◽  
Author(s):  
P. Siffalovic ◽  
E. Majkova ◽  
L. Chitu ◽  
M. Jergel ◽  
S. Luby ◽  
...  

2007 ◽  
Author(s):  
Gianfelice Cinque ◽  
Agostino Raco ◽  
Antonietta Frani ◽  
Antonio Grilli ◽  
Augusto Marcelli ◽  
...  

2013 ◽  
Vol 21 (1) ◽  
pp. 16-23 ◽  
Author(s):  
K. Mundboth ◽  
J. Sutter ◽  
D. Laundy ◽  
S. Collins ◽  
S. Stoupin ◽  
...  

Multilayers are becoming an increasingly important tool in X-ray optics. The essential parameters to design a pair of laterally graded multilayer mirrors arranged in a Montel-type configuration for use as an X-ray collimating device are provided. The results of X-ray reflectometry tests carried out on the optics in addition to metrology characterization are also shown. Finally, using experimental data and combined with X-ray tracing simulations it is demonstrated that the mirror meets all stringent specifications as required for a novel ultra-high-resolution inelastic X-ray scattering spectrometer at the Advanced Photon Source.


2007 ◽  
Vol 62 (6-7) ◽  
pp. 586-592 ◽  
Author(s):  
Gianfelice Cinque ◽  
Antonio Grilli ◽  
Giannantonio Cibin ◽  
Agostino Raco ◽  
Alessandro Patelli ◽  
...  

Author(s):  
R. E. Herfert

Studies of the nature of a surface, either metallic or nonmetallic, in the past, have been limited to the instrumentation available for these measurements. In the past, optical microscopy, replica transmission electron microscopy, electron or X-ray diffraction and optical or X-ray spectroscopy have provided the means of surface characterization. Actually, some of these techniques are not purely surface; the depth of penetration may be a few thousands of an inch. Within the last five years, instrumentation has been made available which now makes it practical for use to study the outer few 100A of layers and characterize it completely from a chemical, physical, and crystallographic standpoint. The scanning electron microscope (SEM) provides a means of viewing the surface of a material in situ to magnifications as high as 250,000X.


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