High-resolution dimensional measurement apparatus using optical scale with different grating pitches
2007 ◽
pp. 1153-1156
2010 ◽
Vol 52
(2)
◽
pp. 91-93
◽
2003 ◽
Vol 69
(3)
◽
pp. 427-432
2011 ◽
Vol 45
(22)
◽
pp. 9680-9686
◽
1967 ◽
Vol 31
◽
pp. 45-46
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