High-repetition-rate compact excimer laser: UV light source for metrology, inspection, direct writing, and material testing

2003 ◽  
Author(s):  
Heinz P. Huber ◽  
Tobias Pflanz ◽  
Andreas Goertler ◽  
Helmut Schillinger
Keyword(s):  
Light Source ◽  
Excimer Laser ◽  
Repetition Rate ◽  
Uv Light ◽  
Material Testing ◽  
High Repetition Rate ◽  
Direct Writing ◽  
High Repetition

5 kHz high repetition rate and high power XeCl excimer laser

1995 ◽  
Vol 66 (11) ◽  
pp. 5162-5164 ◽  
Author(s):  
Tatsumi Goto ◽  
Koji Kakizaki ◽  
Shigeyuki Takagi ◽  
Noboru Okamoto ◽  
Saburo Sato ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Xecl Excimer Laser

High-repetition-rate XeC1 Excimer Laser

1994 ◽  
pp. 199-202
Author(s):  
Saburoh Satoh ◽  
Noboru Okamoto ◽  
Kohji Kakizaki ◽  
Shigeyuki Takagi ◽  
Ken Ishikawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition

High-repetition-rate ArF excimer laser for microlithography

2000 ◽  
Author(s):  
Osamu Wakabayashi ◽  
Tatsuo Enami ◽  
Ken Ishii ◽  
Katsutomo Terashima ◽  
Yasuo Itakura ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Arf Excimer Laser

Development of key components and technologies for a high repetition rate and high-power excimer laser

1998 ◽  
Vol 69 (1) ◽  
pp. 1-9 ◽  
Author(s):  
Tatsumi Goto ◽  
Shigeyuki Takagi ◽  
Kouji Kakizaki ◽  
Saburoh Saton ◽  
Shinichiro Kosugi ◽  
...  
Keyword(s):  
Excimer Laser ◽  
High Power ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition
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