Characterization of film cut position at wafer bevel for effective immersion lithography process

2009 ◽  
Author(s):  
Kazuyuki Matsumaro ◽  
Miyoshi Seki ◽  
Takeshi Kato
2000 ◽  
Vol 11 (3) ◽  
pp. 181-187 ◽  
Author(s):  
Te-Hua Fang ◽  
Cheng-I Weng ◽  
Jee-Gong Chang

2013 ◽  
Vol 1 (4) ◽  
Author(s):  
Prasanna Gandhi ◽  
Kiran Bhole

Various ways of fabricating a three-dimensional (3D) component in a single-layer exposure using spatial variation of exposure dose have been presented in the literature. While some of them are based on dynamic mask process, more recently, a process based on varying intensity of a scanning Gaussian laser beam termed as “bulk lithography” has been proposed. In bulk lithography, the entire varying depth 3D microstructure gets fabricated because of spatial variation of intensity of laser imposed at every point in single layer scan. For the bulk lithography process, this paper first presents experimental characterization of unconstrained depth photopolymerization of resin upon exposure to Gaussian laser beam. Experimental characterization carried out for two resins systems: namely 1,6 hexane diol-diacrylate (HDDA) and trimethylolpropane triacrylate (TMPTA), over relatively wider range of Ar+ laser exposure dose and time, show behavior well beyond Beer–Lambert law. A unified empirical model is proposed to represent the nondimensional depth variation with respect to the time and energy of exposure for both resins. Finally, using these models, successful fabrication of several microstructures including micro-Fresnel lens, textured curved surface, otherwise difficult or impossible to fabricate, is demonstrated. Several advantages of the bulk lithography as compared to other similar processes in the literature are highlighted.


2006 ◽  
Author(s):  
Dario Gil ◽  
Jaione Tirapu-Azpiroz ◽  
Ryan Deschner ◽  
Timothy Brunner ◽  
Carlos Fonseca ◽  
...  

2007 ◽  
Author(s):  
Yasushi Sakaida ◽  
Satoshi Takei ◽  
Makoto Nakajima ◽  
Shigeo Kimura ◽  
Takahiro Sakaguchi ◽  
...  

2014 ◽  
Vol 60 (1) ◽  
pp. 847-853 ◽  
Author(s):  
Q. Ni ◽  
H. Chen ◽  
K. Wang ◽  
Y. Long ◽  
R. Fang

2013 ◽  
Vol 832 ◽  
pp. 517-521 ◽  
Author(s):  
R. Haarindra Prasad ◽  
U. Hashim ◽  
K.L. Foo ◽  
Tijjani Adam ◽  
Mohd Shafiq

This paper mainly illustrate regarding the fabrication process of IDE based sensor for bio-molecular detection process. Material that is utilized in this process is zinc oxide due to bio-compability and elevated electrical characteristic. IDE mask is designed by using auto-cad software which tailors for detection of bio substance which is extremely small scale in size. Zinc Oxide material is also used due to presented of nanostructure that can be synthesized through hydrothermal route. Zinc oxide solution is prepared by series of sol-gel process and is coated on the SiO substrate which acts as insulator layer during the lithography process. IDE mask is patterned transfer on sample by using conventional lithography process which the parameters are critically adjusted to ensure that the pattern transfer process occur with minimal defects. The fabricated sensor will be further validated through electrical and morphological characteristic. Capacitance test and impedance test is taken with various pH solution to observe the response of the sensor with different pH values. Keywords: IDE sensor, bio-compability, Zinc Oxide, auto-cad software, sol-gel, SiO substrate, hydrothermal route


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