Reliability report of high power injection lock laser light source for double exposure and double patterning ArF immersion lithography

2009 ◽  
Author(s):  
Hiroaki Tsushima ◽  
Masaya Yoshino ◽  
Takeshi Ohta ◽  
Takahito Kumazaki ◽  
Hidenori Watanabe ◽  
...  
Keyword(s):  
Light Source ◽  
High Power ◽  
Laser Light ◽  
Double Exposure ◽  
Immersion Lithography ◽  
Power Injection ◽  
Double Patterning ◽  
Injection Lock ◽  
Laser Light Source

Flexible and reliable high power injection locked laser for double exposure and double patterning ArF immersion lithography

2010 ◽  
Author(s):  
Masaya Yoshino ◽  
Hiroshi Umeda ◽  
Hiroaki Tsushima ◽  
Hidenori Watanabe ◽  
Satoshi Tanaka ◽  
...  
Keyword(s):  
High Power ◽  
Double Exposure ◽  
Immersion Lithography ◽  
Power Injection ◽  
Double Patterning

GT40A: durable 45-W ArF injection-lock laser light source for dry/immersion lithography

2006 ◽  
Author(s):  
Satoshi Tanaka ◽  
Hiroaki Tsushima ◽  
Takanori Nakaike ◽  
Taku Yamazaki ◽  
Takashi Saito ◽  
...  
Keyword(s):  
Light Source ◽  
Laser Light ◽  
Immersion Lithography ◽  
Dry Immersion ◽  
Injection Lock ◽  
Laser Light Source

Ultra line narrowed injection lock laser light source for higher NA ArF immersion lithography tool

2007 ◽  
Author(s):  
Toru Suzuki ◽  
Kouji Kakizaki ◽  
Takashi Matsunaga ◽  
Satoshi Tanaka ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Laser Light ◽  
Immersion Lithography ◽  
Injection Lock ◽  
Laser Light Source

scholarly journals Compact high-power red-green-blue laser light source generation from a single lithium tantalate with cascaded domain modulation

2009 ◽  
Vol 17 (12) ◽  
pp. 9509 ◽  
Author(s):  
P. Xu ◽  
L. N. Zhao ◽  
X. J. Lv ◽  
J. Lu ◽  
Y. Yuan ◽  
...  
Keyword(s):  
Light Source ◽  
High Power ◽  
Laser Light ◽  
Lithium Tantalate ◽  
Blue Laser ◽  
Laser Light Source

High-power and high-speed semi-insulating BH structure monolithic electroabsorption modulator/DFB laser light source

1990 ◽  
Vol 26 (1) ◽  
pp. 9-10 ◽  
Author(s):  
H. Soda ◽  
M. Furutsu ◽  
K. Sato ◽  
N. Okazaki ◽  
S. Yamazaki ◽  
...  
Keyword(s):  
Light Source ◽  
High Power ◽  
High Speed ◽  
Laser Light ◽  
Electroabsorption Modulator ◽  
Dfb Laser ◽  
Laser Light Source

Generation of High-Power Terahertz Pulses at the Advanced Laser Light Source (ALLS)

2007 ◽  
Author(s):  
F Blanchard ◽  
L Razzari ◽  
G Sharma ◽  
R Morandotti ◽  
J-C Keiffer ◽  
...  
Keyword(s):  
Light Source ◽  
High Power ◽  
Laser Light ◽  
Terahertz Pulses ◽  
Laser Light Source

High-Power Terahertz Pulses at the Advanced Laser Light Source (ALLS) Laboratory

2007 ◽  
Author(s):  
F. Blanchard ◽  
H.-C. Bandulet ◽  
L. Razzari ◽  
G. Sharma ◽  
R. Morandotti ◽  
...  
Keyword(s):  
Light Source ◽  
High Power ◽  
Laser Light ◽  
Terahertz Pulses ◽  
Laser Light Source
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