GT40A: durable 45-W ArF injection-lock laser light source for dry/immersion lithography

2006 ◽  
Author(s):  
Satoshi Tanaka ◽  
Hiroaki Tsushima ◽  
Takanori Nakaike ◽  
Taku Yamazaki ◽  
Takashi Saito ◽  
...  
Keyword(s):  
Light Source ◽  
Laser Light ◽  
Immersion Lithography ◽  
Dry Immersion ◽  
Injection Lock ◽  
Laser Light Source

Ultra line narrowed injection lock laser light source for higher NA ArF immersion lithography tool

2007 ◽  
Author(s):  
Toru Suzuki ◽  
Kouji Kakizaki ◽  
Takashi Matsunaga ◽  
Satoshi Tanaka ◽  
Yasufumi Kawasuji ◽  
...  
Keyword(s):  
Light Source ◽  
Laser Light ◽  
Immersion Lithography ◽  
Injection Lock ◽  
Laser Light Source

A laser light source for circularly polarized VUV radiation

1998 ◽  
Vol 9 (3) ◽  
pp. 422-427 ◽  
Author(s):  
R Irrgang ◽  
M Drescher ◽  
F Gierschner ◽  
M Spieweck ◽  
U Heinzmann
Keyword(s):  
Light Source ◽  
Laser Light ◽  
Circularly Polarized ◽  
Laser Light Source

Comparative experiments of photoacoustic system using laser light source and LED array light source

2015 ◽  
Author(s):  
Toshitaka Agano ◽  
Naoto Sato ◽  
Hitoshi Nakatsuka ◽  
Kazuo Kitagawa ◽  
Takamitsu Hanaoka ◽  
...  
Keyword(s):  
Light Source ◽  
Laser Light ◽  
Led Array ◽  
Laser Light Source

A New Fiber Bragg Grating Interrogation and Multiplexing Schema Using an F-P Laser Light Source

2017 ◽  
Vol 29 (2) ◽  
pp. 243-246 ◽  
Author(s):  
Lulu Li ◽  
Min Li ◽  
Wenjun Shi ◽  
Haifei Lu ◽  
Xiaoyan Wen ◽  
...  
Keyword(s):  
Fiber Bragg Grating ◽  
Light Source ◽  
Laser Light ◽  
Bragg Grating ◽  
Laser Light Source
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