Fast characterization of line-end shortening and application of novel correction algorithms in e-beam direct write

2011 ◽  
Author(s):  
Martin Freitag ◽  
Kang-Hoon Choi ◽  
Manuela Gutsch ◽  
Christoph Hohle ◽  
Reinhard Galler ◽  
...  
Keyword(s):  
Direct Write

Direct Write Additive Manufacturing and Characterization of Battery Electrodes with Engineered Architecture and Porosity

2020 ◽  
Vol MA2020-01 (1) ◽  
pp. 78-78
Author(s):  
Amjad S Almansour ◽  
Alastair Gorven ◽  
Mrityunjay Singh ◽  
Donald A. Dornbusch
Keyword(s):  
Additive Manufacturing ◽  
Direct Write

scholarly journals Magnetic Characterization of Direct-Write Free-Form Building Blocks for Artificial Magnetic 3D Lattices

Materials ◽  
2018 ◽  
Vol 11 (2) ◽  
pp. 289 ◽  
Author(s):  
Mohanad Al Mamoori ◽  
Lukas Keller ◽  
Jonathan Pieper ◽  
Sven Barth ◽  
Robert Winkler ◽  
...  
Keyword(s):  
Building Blocks ◽  
Free Form ◽  
Direct Write ◽  
Magnetic Characterization

Sol–Gel-Derived 0–3 Composite Materials for Direct Write Electronics Applications

2000 ◽  
Vol 624 ◽  
Author(s):  
Steven M. Coleman ◽  
Robert L. Parkhill ◽  
Robert M. Taylor ◽  
Edward T. Knobbe
Keyword(s):  
Sol Gel ◽  
Electrical Characterization ◽  
Metal Alkoxides ◽  
Direct Write ◽  
Composite Ceramics ◽  
Good Adhesion ◽  
Structural Density ◽  
Tan Δ ◽  
Deposited Films

ABSTRACTThe use of sol–gel-derived 0–3 composite ceramics for low-temperature direct-write electronics applications was investigated. The 0–3 composite paste materials were prepared using selected metal alkoxides and commercial low- and high-κ' dielectric powders. The composite pastes were deposited onto alumina and polyimide substrates using conventional screening and micro-dispensing techniques. The deposited films were oven-dried at or below 200°C and thermally densified using a CO2 laser. The 0–3 composites exhibited good adhesion and structural density. Electrical characterization of the laser-processed dielectrics revealed κ' values as high as 295 and tan δ as low as 0.02 on polyimide substrates.

scholarly journals Low-Power, Multimodal Laser Micromachining of Materials for Applications in sub-5 µm Shadow Masks and sub-10 µm Interdigitated Electrodes (IDEs) Fabrication

Micromachines ◽  
2020 ◽  
Vol 11 (2) ◽  
pp. 178 ◽  
Author(s):  
Cacie Hart ◽  
Swaminathan Rajaraman
Keyword(s):  
Laser Micromachining ◽  
Direct Write ◽  
Electrode Gap ◽  
Interdigitated Electrode ◽  
Microfabrication Technology ◽  
Gap Width ◽  
532 Nm ◽  
Comprehensive Characterization ◽  
Ablation Characteristics

Laser micromachining is a direct write microfabrication technology that has several advantages over traditional micro/nanofabrication techniques. In this paper, we present a comprehensive characterization of a QuikLaze 50ST2 multimodal laser micromachining tool by determining the ablation characteristics of six (6) different materials and demonstrating two applications. Both the thermodynamic theoretical and experimental ablation characteristics of stainless steel (SS) and aluminum are examined at 1064 nm, silicon and polydimethylsiloxane (PDMS) at 532 nm, and Kapton® and polyethylene terephthalate at 355 nm. We found that the experimental data aligned well with the theoretical analysis. Additionally, two applications of this multimodal laser micromachining technology are demonstrated: shadow masking down to approximately 1.5 µm feature sizes and interdigitated electrode (IDE) fabrication down to 7 µm electrode gap width.

Fabrication and characterization of microlens arrays on soda-lime glass using a combination of laser direct-write and thermal reflow techniques

2011 ◽  
Vol 110 (2) ◽  
pp. 023108 ◽  
Author(s):  
Daniel Nieto ◽  
Justo Arines ◽  
Carlos Gomez-Reino ◽  
Gerard M. O’Connor ◽  
M. Teresa Flores-Arias
Keyword(s):  
Soda Lime ◽  
Soda Lime Glass ◽  
Direct Write ◽  
Microlens Arrays ◽  
Fabrication And Characterization ◽  
Laser Direct Write ◽  
Thermal Reflow

Submicron Ferroelectric Elements Fabricated by Direct Electron Beam Lithography

2002 ◽  
Vol 748 ◽  
Author(s):  
Dong-Joo Kim ◽  
Jin Seo Im ◽  
Carol Thompson ◽  
S. K. Streiffer ◽  
G. Wiederrecht ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Lithography ◽  
Scanning Probe ◽  
Mode Switching ◽  
Direct Write ◽  
Ferroelectric Films ◽  
Contact Mode ◽  
Probe Microscope ◽  
Ferroelectric Memory

ABSTRACTTo realize Gigabit density ferroelectric memory devices, downscaling issues involving processing, materials, and fundamental ferroelectric behavior must be resolved. To address patterning and characterizing ferroelectric films at the nanoscale, we have prepared different lateral sizes of ferroelectric PZT capacitors down to 120 nm, using direct-write electron beam lithography. Characterization of the piezoelectric activity of the patterned elements was performed by means of piezoelectric-sensitive scanning probe microscope in the contact mode. Switching of single 120 nm cells was achieved.

Real-time optical characterization of laser oxidation process in bimetallic direct write gray scale photomasks

2006 ◽  
Author(s):  
David K. Poon ◽  
Glenn H. Chapman ◽  
Chinheng Choo ◽  
Marian Chang ◽  
Jun Wang ◽  
...  
Keyword(s):  
Real Time ◽  
Oxidation Process ◽  
Optical Characterization ◽  
Direct Write ◽  
Gray Scale

Experimental Characterization of Aerosol Flow Through a Micro-Capillary

2010 ◽  
Author(s):  
Zakaria Mahmud ◽  
Justin M. Hoey ◽  
Artur Lutfurakhmanov ◽  
Jason Daugs ◽  
Orven F. Swenson ◽  
...  
Keyword(s):  
Coming Out ◽  
Experimental Validation ◽  
Direct Write ◽  
Particle Sizing ◽  
Experimental Characterization ◽  
Small Particles ◽  
Aerosol Flow ◽  
Geometric Convergence ◽  
Flow Through

Aerosol flow through a long and tapered micro-capillary (MC) for direct write (DW) technology is typically used with small particles of sizes ranging from 0.2 μm to 10 μm at velocities up to 100 m/s. Earlier research showed that the particles coming through a long MC experience Saffman force that moves the particles towards the center of the beam other than the geometric convergence (due to Stokes drag); thus creating a collimated aerosol beam. It was also established that the additional Saffman force becomes more effective with certain particle diameters and velocities. Therefore, for experimental validation, it is important to accurately measure the particle size distribution and velocities coming out of the long MC. However, the current sizing methods are incapable of measuring particles less than 5 μm due to optical limitations. The current paper presents results using a micro-shadowgraphy system from LaVision Inc. to characterize the flow field. A modification of the particle-sizing algorithm is proposed to measure particles of sub-micron sizes. The modified algorithm can be used to accurately size particles of 1μm diameter.

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