Characterization Of Structure In Thin Polymer Resist Films

Author(s):  
L. L. Kosbar ◽  
S. W. J. Kuan ◽  
C. W. Frank ◽  
R. F. W. Pease
Keyword(s):  
2001 ◽  
Vol 707 ◽  
Author(s):  
Ian C. Bache ◽  
Catherine M. Ramsdale ◽  
D. Steve Thomas ◽  
Ana-Claudia Arias ◽  
J. Devin MacKenzie ◽  
...  

ABSTRACTCharacterising the morphology of thin films for use in device applications requires the ability to study both the structure within the plane of the film, and also through its thickness. Environmental scanning electron microscopy has proved to be a fruitful technique for the study of such films both because contrast can be seen within the film without the need for staining (as is conventionally done for electron microscopy), and because cross-sectional images can be obtained without charging artefacts. The application of ESEM to a particular blend of relevance to photovoltaics is described.


2009 ◽  
Vol 517 (15) ◽  
pp. 4348-4354 ◽  
Author(s):  
Junlong Song ◽  
Jing Liang ◽  
Xiaomeng Liu ◽  
Wendy E. Krause ◽  
Juan P. Hinestroza ◽  
...  

2006 ◽  
Vol 77 (10) ◽  
pp. 104901 ◽  
Author(s):  
Hironori Tohmyoh ◽  
Takuya Imaizumi ◽  
Masumi Saka

1991 ◽  
Vol 94 (4) ◽  
pp. 3235-3241 ◽  
Author(s):  
M. Abraham ◽  
J. Dütting ◽  
M. Schreck ◽  
R. Lege ◽  
S. Reich ◽  
...  

2010 ◽  
Vol 1272 ◽  
Author(s):  
Guillaume Riboux ◽  
Álvaro Gómez-Marín ◽  
Antonio Barrero ◽  
Alberto Fernández-Nieves ◽  
Ignacio G. Loscertales

AbstractCapillary liquid flows have shown their ability to generate micro and nano-structures which can be used to synthesize material in the micro or nanometric size range. For instance, electrified capillary liquid jets issued from a Taylor are broadly used to spin micro and nanofibers when the liquid consists of a polymer solution or melt, a process termed electrospinning. In this process, the electrified capillary jet may develop a nonaxisymmetric instability, usually referred to as whipping instability, which very efficiently transforms electric energy into stretching energy, thus leading to the formation of extremely thin polymer fibers. Even though non axysimmetric instabilities of electrified jets were first investigated some decades ago, the existing theoretical models provide a qualitative understanding of the phenomenon but none of them is accurate enough when compared with experimental results. This whipping instability usually manifests itself as fast and violent lateral motion of the charged jet, which makes it difficult its characterization in the laboratory. However, this instability also develops when electrospinning is performed within a liquid bath instead of air. Although it is essentially the same phenomenon, the frequency of the whipping oscillations is much slower in the former case than in the latter, thus allowing detailed experimental characterization of the whipping instability. Furthermore, since the outer fluid is a liquid, its density and viscosity may now be used to influence the dynamics of the electrified capillary jet. In this work we present and rationalize the experimental data collecting the influence of the main parameters on the whipping characteristics of the electrified jet (frequency, amplitude, etc.).


2001 ◽  
Vol 164 (1) ◽  
pp. 159-166
Author(s):  
Gerald Steiner ◽  
Olesya Savchuk ◽  
Hella Möller ◽  
Dirk Ferse ◽  
Hans-Jürgen Adler ◽  
...  

2001 ◽  
Author(s):  
Dongmin Wu ◽  
Nicholas Fang ◽  
Cheng Sun ◽  
Xiang Zhang

Abstract Micro-stereolithography (μSL) is an advanced technology that enables fabrication of highly complex three-dimensional polymer microstructures out of UV curable resin. However, releasing of polymerized structures from un-polymerized resin is found to influence substantially the fabrication reliability of μSL, as the surface tension tends to push the fine structures together and cause collapse or adhesion. A theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and solid surface tension of a typical μSL polymer (HDDA) are obtained experimentally. In this paper, we applied sublimation process to overcome the adhesion problem With the new drying process, no adhesion phenomenon was observed.


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