Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model

Ximing Zhu; Yikang Pu

doi:10.1088/1009-0630/13/3/02

Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model

Plasma Science and Technology ◽

10.1088/1009-0630/13/3/02 ◽

2011 ◽

Vol 13 (3) ◽

pp. 267-278 ◽

Cited By ~ 8

Author(s):

Ximing Zhu ◽

Yikang Pu

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Energy Distributions ◽

Collisional Radiative Model ◽

Radiative Model

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Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/37/19/r01 ◽

2004 ◽

Vol 37 (19) ◽

pp. R217-R236 ◽

Cited By ~ 181

Author(s):

V M Donnelly

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Plasma Electron ◽

Rare Gases ◽

Energy Distributions

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Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.1467398 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6288 ◽

Cited By ~ 29

Author(s):

V. M. Donnelly ◽

M. J. Schabel

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Rare Gases ◽

Energy Distributions ◽

Inductively Coupled ◽

Spatially Resolved

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Assessment of Electron Energy Distributions in Discharges by Optical Emission Spectroscopy

10.1063/1.2821299 ◽

2007 ◽

Cited By ~ 1

Author(s):

Dirk Dodt ◽

Andreas Dinklage ◽

Rainer Fischer ◽

Roland Preuss ◽

Kevin H. Knuth ◽

...

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distributions

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Analysis of DC magnetron discharges in Ar- gas mixtures. Comparison of a collisional-radiative model with optical emission spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/7/2/016 ◽

1998 ◽

Vol 7 (2) ◽

pp. 219-229 ◽

Cited By ~ 52

Author(s):

F Debal ◽

J Bretagne ◽

M Jumet ◽

M Wautelet ◽

J P Dauchot ◽

...

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Gas Mixtures ◽

Collisional Radiative Model ◽

Radiative Model ◽

Ar Gas

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Determination of electron temperature in low-pressure plasmas by means of optical emission spectroscopy

JETP Letters ◽

10.1134/s0021364010050061 ◽

2010 ◽

Vol 91 (5) ◽

pp. 231-235 ◽

Cited By ~ 8

Author(s):

S. Mitic ◽

B. A. Klumov ◽

M. Y. Pustylnik ◽

G. E. Morfill

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure

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Determination of the electron energy distribution function via optical emission spectroscopy and a Langmuir probe in an ICP

Plasma Sources Science and Technology ◽

10.1088/0963-0252/17/3/035004 ◽

2008 ◽

Vol 17 (3) ◽

pp. 035004 ◽

Cited By ~ 14

Author(s):

N Bibinov ◽

H Halfmann ◽

P Awakowicz

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distribution Function

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Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

Journal of Applied Physics ◽

10.1063/1.3664858 ◽

2011 ◽

Vol 110 (11) ◽

pp. 113303 ◽

Cited By ~ 20

Author(s):

E. Abdel-Fattah ◽

M. Bazavan ◽

H. Sugai

Keyword(s):

Electron Energy ◽

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Rf Discharge ◽

Energy Distributions ◽

Capacitively Coupled ◽

Probe Diagnostics

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Study of argon ions density and electron temperature and density in magnetron plasma by optical emission spectroscopy and collisional-radiative model

Resource-efficient Technologies ◽

10.1016/j.reffit.2017.04.002 ◽

2017 ◽

Vol 3 (2) ◽

pp. 187-193 ◽

Cited By ~ 13

Author(s):

Kirill E. Evdokimov ◽

Maxim E. Konischev ◽

Vladimir F. Pichugin ◽

Z. Sun

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Collisional Radiative Model ◽

Radiative Model ◽

Argon Ions

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Animal and vegetable fats and oils. Determination of trace elements by inductively coupled plasma optical emission spectroscopy (ICP-OES)

10.3403/30303050u ◽

2016 ◽

Keyword(s):

Trace Elements ◽

Inductively Coupled Plasma ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Fats And Oils ◽

Icp Oes ◽

Inductively Coupled ◽

Plasma Optical Emission Spectroscopy

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Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496165 ◽

2017 ◽

Author(s):

Patrick Hermanns ◽

Bastian Hillebrand ◽

Marcel Fiebrandt ◽

Peter Awakowicz

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Low Pressure

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