Nonlinear dynamics of longitudinal structures in the electron cloud of a coaxial electron string ion source

AbstractIn this paper, an attempt to develop the original single mode theory describing the nonlinear dynamics of a linearly unstable plasma wave, excited by the resonant interaction with energetic ions near the stability threshold to the case of n interacting plasma modes has been made. The effects of an energetic ion source and classical collisional processes represented by the Krook, diffusion and dynamical friction (drag) collision operators are included in the model. For numerical purposes, the problem has been reduced to ten nonlinearly coupled integro-differential equations. In comparison to the previous papers, the system revealed similar (the steady-state, oscillation, and blow-up solutions), as well as quite new types of the amplitudes behaviour, i.e. different levels of competition between the modes.

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Nucleation and Early Growth of Sputtered thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100069570 ◽

1970 ◽

Vol 28 ◽

pp. 516-517

Author(s):

Dudley M. Sherman ◽

Thos. E. Hutchinson

Keyword(s):

Thin Films ◽

Electron Beam ◽

Ion Beam ◽

Ion Source ◽

Water Cooling ◽

Stages Of Growth ◽

Lens Assembly ◽

Microscope Technique ◽

Ion Beam Sputter Deposition

The in situ electron microscope technique has been shown to be a powerful method for investigating the nucleation and growth of thin films formed by vacuum vapor deposition. The nucleation and early stages of growth of metal deposits formed by ion beam sputter-deposition are now being studied by the in situ technique.A duoplasmatron ion source and lens assembly has been attached to one side of the universal chamber of an RCA EMU-4 microscope and a sputtering target inserted into the chamber from the opposite side. The material to be deposited, in disc form, is bonded to the end of an electrically isolated copper rod that has provisions for target water cooling. The ion beam is normal to the microscope electron beam and the target is placed adjacent to the electron beam above the specimen hot stage, as shown in Figure 1.

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To What Extent are Inelastically Scattered Electrons Useful in the Stem?

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100071879 ◽

1973 ◽

Vol 31 ◽

pp. 286-287 ◽

Cited By ~ 2

Author(s):

H. Rose

Keyword(s):

Electron Microscope ◽

High Resolution ◽

Electron Correlation ◽

Quantum Noise ◽

Collection Efficiency ◽

Scanning Transmission Electron Microscope ◽

Electron Cloud ◽

Scanning Time ◽

Transmission Electron ◽

Scanning Transmission

The scanning transmission electron microscope offers the possibility of utilizing inelastically scattered electrons. Use of these electrons in addition to the elastically scattered electrons should reduce the scanning time (dose) Which is necessary to keep the quantum noise below a certain level. Hence it should lower the radiation damage. For high resolution, Where the collection efficiency of elastically scattered electrons is small, the use of Inelastically scattered electrons should become more and more favorable because they can all be detected by means of a spectrometer. Unfortunately, the Inelastic scattering Is a non-localized interaction due to the electron-electron correlation, occurring predominantly at the circumference of the atomic electron cloud.

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Aspects of high-resolution imaging with a scanning ion microprobe

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010014511x ◽

1986 ◽

Vol 44 ◽

pp. 750-751

Author(s):

R. Levi-Setti ◽

J. M. Chabala ◽

Y. L. Wang

Keyword(s):

Metal Ion ◽

Secondary Ion Mass Spectrometry ◽

Chromatic Aberration ◽

Ion Source ◽

Ion Microprobe ◽

Emission Pattern ◽

Intrinsic Resolution ◽

Resolution Imaging ◽

20 Nm ◽

Secondary Ion

We have shown the feasibility of 20 nm lateral resolution in both topographic and elemental imaging using probes of this size from a liquid metal ion source (LMIS) scanning ion microprobe (SIM). This performance, which approaches the intrinsic resolution limits of secondary ion mass spectrometry (SIMS), was attained by limiting the size of the beam defining aperture (5μm) to subtend a semiangle at the source of 0.16 mr. The ensuing probe current, in our chromatic-aberration limited optical system, was 1.6 pA with Ga+ or In+ sources. Although unique applications of such low current probes have been demonstrated,) the stringent alignment requirements which they imposed made their routine use impractical. For instance, the occasional tendency of the LMIS to shift its emission pattern caused severe misalignment problems.

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