Collisionless sheaths of capacitively coupled RF discharge at various frequencies

2006 ◽  
Vol 32 (8) ◽  
pp. 719-724 ◽  
Author(s):  
D. S. Nikandrov ◽  
L. D. Tsendin
2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.


1989 ◽  
Vol 158 ◽  
Author(s):  
P. John ◽  
I.M. Odeh ◽  
A. Qayyum ◽  
J.I.B. Wilson

ABSTRACTHydrogenated amorphous silicon-carbon alloys, a-Si:C:H, have been deposited as thin films (d=0.1-0.5 micron) on crystalline silicon substrates from a capacitively coupled rf discharge in silane-propane mixtures. Variations in the stoichiometry of the films were achieved by altering the ratio of SiH4 to C3H8 flow rates at a sbstrate temperature in the range 240-260°C and total pressure between 30-70 mtorr. The silicon to carbon ratios were established by X-ray photoelectron spectroscopy, XPS, and the hydrogen content and distribution by infra-red spectroscopy.


2011 ◽  
Author(s):  
W. X. Chew ◽  
S. V. Muniandy ◽  
C. S. Wong ◽  
S. L. Yap ◽  
K. S. Tan

2014 ◽  
Vol 783-786 ◽  
pp. 1238-1243 ◽  
Author(s):  
Birgit Finke ◽  
Holger Testrich ◽  
Henrike Rebl ◽  
Barbara Nebe ◽  
Rainer Bader ◽  
...  

Titanium implant surfaces should ideally be designed to support the subsequent clinical application. Therefore temporarily used implants have to fulfill both the mechanical stabilization of the bone stock and furthermore in trauma surgery the disintegration into the bone because the implant should be removed after fracture healing. The anti-adhesive plasma-fluorocarbon-polymer (PFP) films were synthesized using two different low-pressure plasma sources, the 2.45 GHz microwave (mw) and the 13.56 MHz capacitively coupled radio-frequency (rf) discharge in a mixture of the precursor octafluoropropane (C3F8) and hydrogen (H2). The film properties were characterized using X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, water contact angle measurements, and abrasive strength tests. Cell adhesion and spreading of human osteoblasts were clearly reduced on these PFP surfaces. First in vivo data on the biocompatibility of the PFP films deposited in the rf-discharge demonstrate that the local inflammatory tissue response for PFP coating was comparable to controls, while a PFP coating deposited in mw plasma induced stronger tissue reactions.


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