Fabrication of patterned organic thin film by low-energy electron beam lithography and surface-initiated ring-opening metathesis polymerization
Keyword(s):
High densities of immobilized polymer brushes have been created on solid supports in a spatially addressable fashion. Octadecyltrichlorosilane was self-assembled on a silicon substrate to form an inert monolayer. The substrate was then patterned by low-energy electron beam lithography. Finally, the exposed region was back-filled with a second functionalized silane and the pattern was further amplified by surface-initiated ring-opening metathesis polymerization. The patterned substrate was imaged by scanning electron microscopy and atomic force microscopy.Key words: patterned thin film, e-beam lithography, ring-opening metathesis polymerization, polymer brushes.
2001 ◽
Vol 57-58
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pp. 297-302
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2002 ◽
Vol 41
(Part 1, No. 6B)
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pp. 4157-4162
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1993 ◽
Vol 8
(7)
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pp. 1490-1492
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1987 ◽
Vol 26
(Part 2, No. 7)
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pp. L1165-L1167
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2000 ◽
Vol 18
(6)
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pp. 3122
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2006 ◽
Vol 83
(4-9)
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pp. 788-791
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2004 ◽
Vol 22
(6)
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pp. 3518
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