GENERATION AND APPLICATION OF HIGH DENSITY LOW-FREQUENCY INDUCTIVELY COUPLED PLASMAS

2008 ◽  
Author(s):  
SHUYAN XU ◽  
KOSTYA OSTRIKOV
Keyword(s):  
Low Frequency ◽  
High Density ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

Advanced selective dry etching of GaAs/AlGaAs in high density inductively coupled plasmas

2000 ◽  
Vol 18 (4) ◽  
pp. 1220-1224 ◽  
Author(s):  
J. W. Lee ◽  
M. W. Devre ◽  
B. H. Reelfs ◽  
D. Johnson ◽  
J. N. Sasserath ◽  
...  
Keyword(s):  
Dry Etching ◽  
High Density ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

In situ catalyzation of carbon nanostructures growth in low-frequency inductively coupled plasmas

2005 ◽  
Vol 33 (2) ◽  
pp. 240-241 ◽  
Author(s):  
J.D. Long ◽  
S. Xu ◽  
S.Y. Huang ◽  
P.P. Rutkevych ◽  
M. Xu ◽  
...  
Keyword(s):  
Carbon Nanostructures ◽  
Low Frequency ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

High Density Plasma Etching of Platinum Films in BCl3/Ar and CF4/Ar Inductively Coupled Plasmas

2009 ◽  
Vol 5 (4) ◽  
pp. 205-208 ◽  
Author(s):  
Jong Cheon Park ◽  
Sungu Hwang ◽  
Jong-Man Kim ◽  
Jin Kon Kim ◽  
Eun-Hee Kim ◽  
...  
Keyword(s):  
Plasma Etching ◽  
High Density ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas ◽  
Density Plasma

scholarly journals Effect of an internal rotating current on low-frequency inductively coupled plasmas

2001 ◽  
Vol 63 (4) ◽  
Author(s):  
E. L. Tsakadze ◽  
K. N. Ostrikov ◽  
Xu ◽  
I. R. Jones ◽  
R. Storer ◽  
...  
Keyword(s):  
Low Frequency ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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