From amorphous to microcrystalline: Phase transition in rapid synthesis of hydrogenated silicon thin film in low frequency inductively coupled plasmas

2010 ◽  
Vol 108 (11) ◽  
pp. 113520 ◽  
Author(s):  
S. Q. Xiao ◽  
S. Xu ◽  
D. Y. Wei ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Film ◽  
Phase Transition ◽  
Low Frequency ◽  
Inductively Coupled Plasmas ◽  
Silicon Thin Film ◽  
Rapid Synthesis ◽  
Hydrogenated Silicon ◽  
Inductively Coupled ◽  
Coupled Plasmas

A study on the etch characteristics of ITO thin film using inductively coupled plasmas

2000 ◽  
Vol 131 (1-3) ◽  
pp. 247-251 ◽  
Author(s):  
J.Y. Park ◽  
H.S. Kim ◽  
D.H. Lee ◽  
K.H. Kwon ◽  
G.Y. Yeom
Keyword(s):  
Thin Film ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

In situ catalyzation of carbon nanostructures growth in low-frequency inductively coupled plasmas

2005 ◽  
Vol 33 (2) ◽  
pp. 240-241 ◽  
Author(s):  
J.D. Long ◽  
S. Xu ◽  
S.Y. Huang ◽  
P.P. Rutkevych ◽  
M. Xu ◽  
...  
Keyword(s):  
Carbon Nanostructures ◽  
Low Frequency ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas

scholarly journals Effect of an internal rotating current on low-frequency inductively coupled plasmas

2001 ◽  
Vol 63 (4) ◽  
Author(s):  
E. L. Tsakadze ◽  
K. N. Ostrikov ◽  
Xu ◽  
I. R. Jones ◽  
R. Storer ◽  
...  
Keyword(s):  
Low Frequency ◽  
Inductively Coupled Plasmas ◽  
Inductively Coupled ◽  
Coupled Plasmas
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