Optical and structural characterization of silicon nitride thin films deposited by PECVD
2019 ◽
Vol 246
◽
pp. 21-26
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2005 ◽
Vol 109
(1)
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pp. 47-51
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Keyword(s):
2001 ◽
Vol 206-213
◽
pp. 531-534
2001 ◽
Vol 36
(15)
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pp. 2613-2626
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1998 ◽
Vol 264-268
◽
pp. 1225-1228
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1993 ◽
Vol 65-66
◽
pp. 313-318
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2011 ◽
Vol 50
(6)
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pp. 063001
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2001 ◽
Vol 40
(Part 1, No. 6B)
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pp. 4292-4298
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2013 ◽
Vol 265
◽
pp. 180-186
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Keyword(s):
Structural characterization of thin films formed or changed on materials by micro Raman spectroscopy
1998 ◽
Vol 361
(6-7)
◽
pp. 619-620
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Keyword(s):
2014 ◽
Vol 4
(1)
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pp. 106-111
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