Optical and structural characterization of silicon nitride thin films deposited by PECVD

2019 ◽  
Vol 246 ◽  
pp. 21-26 ◽  
Author(s):  
I. Guler
2005 ◽  
Vol 109 (1) ◽  
pp. 47-51 ◽  
Author(s):  
I. Alessandri ◽  
E. Comini ◽  
E. Bontempi ◽  
G. Sberveglieri ◽  
L.E. Depero

2001 ◽  
Vol 36 (15) ◽  
pp. 2613-2626 ◽  
Author(s):  
N.S Gaikwad ◽  
C.H Bhosale

1998 ◽  
Vol 264-268 ◽  
pp. 1225-1228 ◽  
Author(s):  
Sukkaneste Tungasmita ◽  
Jens Birch ◽  
L. Hultman ◽  
Erik Janzén ◽  
J.-E. Sundgren

1993 ◽  
Vol 65-66 ◽  
pp. 313-318 ◽  
Author(s):  
M. Di Giulio ◽  
M.C. Nicotra ◽  
M. Re ◽  
R. Rella ◽  
P. Siciliano

2011 ◽  
Vol 50 (6) ◽  
pp. 063001 ◽  
Author(s):  
Jumpei Higuchi ◽  
Mitsuru Ohtake ◽  
Yoichi Sato ◽  
Tsutomu Nishiyama ◽  
Masaaki Futamoto

2001 ◽  
Vol 40 (Part 1, No. 6B) ◽  
pp. 4292-4298 ◽  
Author(s):  
Xue-Sen Wang ◽  
Zongquan Li ◽  
Lei Wang ◽  
Yanfang Hu ◽  
Guangjie Zhai ◽  
...  
Keyword(s):  

2014 ◽  
Vol 4 (1) ◽  
pp. 106-111 ◽  
Author(s):  
Soumaia Abbas ◽  
Atman Haoua ◽  
Boubaker Haoua ◽  
Achour Rahal

Sign in / Sign up

Export Citation Format

Share Document