Influence of Deposition Parameters on TiCxN1-x Composite Films by Multi-aRC Ion Plating

Ti,Cr)N films were fabricated on the well-polished high-speed-steel substrate under various deposition conditions by arc ion plating. X-ray diffraction was employed to characterize the phase and microstructure of the films, and the preferred orientation of the crystalline plane was discussed in terms of negative bias and nitrogen flow, respectively. The morphology of the films was investigated using scanning electron microscopy. The size and density of macro-particles were compared for different bias and nitrogen flow. The mechanical properties of the films were investigated. The hardness and elastic module were tested by the XP nanoindenter. The results show that the size as well as the number of the macro-particles decreases with increasing negative bias, presenting a smoother surface. The films have preferred (111) plane at low biases but (200) plane at high ones. The hardness and elastic modulus of (Ti,Cr)N films increases with increasing negative bias. Larger hardness can be achieved by increasing nitrogen flow. It is found that the mechanical properties, such as hardness and elastic module of (Ti, Cr)N films are better than those of TiN films, according to the comparison of the experimental results. It indicates that the mechanical properties of TiN can be enhanced by doping Cr. The mechanism is also discussed and analysed by taking deposition parameters into account.

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Deposition of NiTiN nano-composite films by cathodic arc ion-plating

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(96)00543-5 ◽

1997 ◽

Vol 121 (1-4) ◽

pp. 133-136 ◽

Cited By ~ 19

Author(s):

M. Irie ◽

H. Ohara ◽

A. Nakayama ◽

N. Kitagawa ◽

T. Nomura

Keyword(s):

Composite Films ◽

Nano Composite ◽

Arc Ion Plating ◽

Ion Plating ◽

Cathodic Arc

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Influence of deposition parameters on hard Cr–Al–N coatings deposited by multi-arc ion plating

Applied Surface Science ◽

10.1016/j.apsusc.2011.11.127 ◽

2012 ◽

Vol 258 (8) ◽

pp. 3629-3636 ◽

Cited By ~ 67

Author(s):

Lei Wang ◽

Shihong Zhang ◽

Zhong Chen ◽

Jinlong Li ◽

Mingxi Li

Keyword(s):

Arc Ion Plating ◽

Ion Plating ◽

Deposition Parameters

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Research on the Process of (Ti,Cr)N by Multi-Arc Ion Plating and Microstructure of Composite Films

Applied Mechanics and Materials ◽

10.4028/www.scientific.net/amm.364.721 ◽

2013 ◽

Vol 364 ◽

pp. 721-726

Author(s):

Yan Zhang ◽

Yuan Gao ◽

Wei Qin Wu ◽

Lin Yuan ◽

Cheng Lei Wang ◽

...

Keyword(s):

Stainless Steel ◽

Martensitic Stainless Steel ◽

Composite Films ◽

Micro Hardness ◽

Arc Ion Plating ◽

Ion Plating ◽

Cr Content ◽

Result Show ◽

Ti Content

In this study, the (Ti,Cr)N composite films were deposited on 4Cr13 martensitic stainless steel by multi-arc ion plating (MAIP), researched the composition, morphology and micro-hardness of (Ti,Cr)N composite films by the method of changing the current of Cr target and Ti target. The result show that: with the acr current increasing, the Cr content of (Ti,Cr)N composite films increased, the Ti content decreased, the number and size of droplets decreased, and the hardness of composite films increased first, then decreased. When the acr current was 70A, the hardness reached the maximum. At the same time, the phases of composite films changed when the Cr content increased. When the value of X was 0.28, the phase of composite was TiN and when the value of X was 0.37 or 0.65, the composite films appeared the phase of CrN and Cr2N.

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