Terahertz Quantum-Cascade Laser Based on the Resonant-Phonon Depopulation Scheme
2016 ◽
Vol 25
(03n04)
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pp. 1640022
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We have designed GaAs/Al0.15Ga0.85As multilayer heterostructure (MH) with diagonal transitions and optimized oscillator strength – 0.425. We investigate the dependence of the MH energy band profile on the electric field and thermal properties of terahertz quantum cascade lasers (THz QCL) under different operation conditions. Furthermore, we develop a technique for the fabrication of THz QCL with double metal waveguide via low-temperature In-Au wafer bonding followed by substrate removal. Inductively coupled plasma reactive ion etching in BCl3/Ar at 15:15 sccm has been used to obtain ridge structure of various widths with vertical sidewalls.
2011 ◽
Vol 26
(10)
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pp. 105021
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