scholarly journals Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching

Photonics ◽  
2020 ◽  
Vol 7 (3) ◽  
pp. 45
Author(s):  
Kamil Pierściński ◽  
Dorota Pierścińska ◽  
Aleksandr Kuźmicz ◽  
Grzegorz Sobczak ◽  
Maciej Bugajski ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Quantum Cascade ◽  
Inductively Coupled ◽  
Detection Systems ◽  
Mode Suppression ◽  
Cascade Lasers ◽  
Coupled Cavity ◽  
Better Than

In this work, two-section, coupled cavity, mid-IR quantum cascade lasers (QCLs) were characterized in terms of their tuning range and emission stability under operation towards potential application in detection systems. Devices were processed by inductively coupled plasma reactive ion etching (ICP-RIE) from InP-based heterostructure, designed for emission in the 9.x micrometer range. Single mode devices were demonstrated with a better than 20 dB side mode suppression ratio (SMRS). The fabrication method resulted in improved yield, as well as high repeatability of individual devices. Continuous, mode-hop-free tuning of emission wavelength was observed across ~4.5 cm−1 for the range of temperatures of the heat sink from 15 °C to 70 °C. Using the thermal perturbation in the lasing cavity, in conjunction with controlled hopping between coupled-cavity (CC) modes, we were able to accomplish tuning over the range of up to ~20 cm−1.

Processing of deeply etched GaAs/AlGaAs quantum cascade lasers with grating structures

2004 ◽  
Vol 829 ◽  
Author(s):  
S. Golka ◽  
M. Austerer ◽  
C. Pflügl ◽  
W. Schrenk ◽  
G. Strasser
Keyword(s):  
Coupling Coefficient ◽  
Inductively Coupled Plasma ◽  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Mid Infrared ◽  
Quantum Cascade ◽  
Inductively Coupled ◽  
Icp Etching ◽  
Grating Coupling ◽  
Cascade Lasers

ABSTRACTGratings in GaAs/AlGaAs mid-infrared quantum cascade lasers (QCLs) are fabricated with a structure depth of more than 10 μm. A N2/SiCl4 inductively coupled plasma reactive ion etching (ICP-RIE) process was employed to achieve extremely smooth sidewalls and selectivities to the SiNX etch mask of up to 70:1. EDX spectra measured on as-etched samples show that sidewall etch inhibition is caused by a thin Si containing layer on the sidewalls that is formed simultaneously with ICP etching of GaAs at the bottom of the trenches. To demonstrate device application gratings with a pitch of 1.72 μm are applied to long rib waveguide -based QCLs emitting at λ = 10.7 μm. When etched laterally together with the rib the grating gives rise to stable single mode emission up to 295K from these QCLs. The respective grating coupling coefficient is determined to be κ = 29 cm-1.

scholarly journals Coupled-cavity terahertz quantum cascade lasers for single mode operation

2014 ◽  
Vol 104 (24) ◽  
pp. 241102 ◽  
Author(s):  
H. Li ◽  
J. M. Manceau ◽  
A. Andronico ◽  
V. Jagtap ◽  
C. Sirtori ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Single Mode Operation ◽  
Quantum Cascade ◽  
Mode Operation ◽  
Cascade Lasers ◽  
Coupled Cavity

scholarly journals Monolithic, Optically Coupled, Multi-Section Mid-IR Quantum Cascade Lasers

Photonics ◽  
2021 ◽  
Vol 8 (12) ◽  
pp. 583
Author(s):  
Kamil Pierściński ◽  
Dorota Pierścińska ◽  
Grzegorz Sobczak ◽  
Aleksandr Kuźmicz ◽  
Krzysztof Chmielewski ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Wavelength Shift ◽  
Time Resolved ◽  
Design Modification ◽  
Quantum Cascade ◽  
Continuous Tuning ◽  
Wide Range ◽  
Cascade Lasers ◽  
Coupled Cavity

Mid-infrared (mid-IR λ ≈ 3–12 μm), single-mode-emission Quantum Cascade Lasers (QCLs) are of significant interest for a wide range of applications, especially as the laser sources are chosen for laser absorption spectroscopy. In this work, we present the design, fabrication and characterization of multi-section, coupled-cavity, mid-IR quantum cascade lasers. The purpose of this work is to propose a design modification for a coupled-cavity device, yielding a single-mode emission with a longer range of continuous tuning during the pulse, in contrast to a 2-section device. This effect was obtained and demonstrated in the work. The proposed design of a 3-section coupled-cavity QCL allows for a single-mode emission with 35 dB side-mode suppression ratio. Additionally, the time-resolved spectra of the wavelength shift during pulse operation, show a continuous tuning of ~3 cm−1 during the 2 μs pulse. The devices were fabricated in a slightly modified, standard laser process using dry etching.

Single-mode quantum cascade lasers employing a candy-cane shaped monolithic coupled cavity

2011 ◽  
Vol 99 (24) ◽  
pp. 241112 ◽  
Author(s):  
Peter Q. Liu ◽  
Kamil Sladek ◽  
Xiaojun Wang ◽  
Jen-Yu Fan ◽  
Claire F. Gmachl
Keyword(s):  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Quantum Cascade ◽  
Cascade Lasers ◽  
Coupled Cavity

Terahertz Quantum-Cascade Laser Based on the Resonant-Phonon Depopulation Scheme

2016 ◽  
Vol 25 (03n04) ◽  
pp. 1640022 ◽  
Author(s):  
Rustam A. Khabibullin ◽  
Nikolay V. Shchavruk ◽  
Aleksandr Yu. Pavlov ◽  
Alexey N. Klochkov ◽  
Dmitry S. Ponomarev ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Quantum Cascade Lasers ◽  
Ridge Structure ◽  
Quantum Cascade ◽  
Inductively Coupled ◽  
Substrate Removal ◽  
Operation Conditions ◽  
Metal Waveguide ◽  
Band Profile ◽  
Cascade Lasers

We have designed GaAs/Al0.15Ga0.85As multilayer heterostructure (MH) with diagonal transitions and optimized oscillator strength – 0.425. We investigate the dependence of the MH energy band profile on the electric field and thermal properties of terahertz quantum cascade lasers (THz QCL) under different operation conditions. Furthermore, we develop a technique for the fabrication of THz QCL with double metal waveguide via low-temperature In-Au wafer bonding followed by substrate removal. Inductively coupled plasma reactive ion etching in BCl3/Ar at 15:15 sccm has been used to obtain ridge structure of various widths with vertical sidewalls.

Single-mode enhancement in coupled-cavity quantum cascade lasers

2016 ◽  
Author(s):  
M. Kuc ◽  
R. P. Sarzała ◽  
T. Czyszanowski ◽  
M. Bugajski
Keyword(s):  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Quantum Cascade ◽  
Cascade Lasers ◽  
Coupled Cavity

scholarly journals Особенности одночастотной генерации в квантово-каскадных лазерах спектрального диапазона 7.5-8.0 μm с малой длиной резонатора

2022 ◽  
Vol 48 (5) ◽  
pp. 7
Author(s):  
А.В. Бабичев ◽  
Е.С. Колодезный ◽  
А.Г. Гладышев ◽  
Д.В. Денисов ◽  
Н.Ю. Харин ◽  
...  
Keyword(s):  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Threshold Current ◽  
Wavelength Shift ◽  
Quantum Cascade ◽  
Mode Suppression ◽  
Fabry Perot ◽  
Lasing Regime ◽  
Temperature Tuning ◽  
Cascade Lasers

The possibility of realizing single-mode emission in quantum-cascade lasers due to modulation of output optical losses in a Fabry-Perot cavity is demonstrated. For the active region of the 7.5–8.0 μm spectral range, two-phonon resonance design we used thus the 50 stages and waveguide layers based on indium phosphide made it possible to realize single-mode lasing at 7.765 μm and at temperature of 292 K. Side-mode suppression ratio was about 24 dB and remained the same with an increase in the current pumping up to 1.2 of the threshold current values. The coefficient of wavelength shift with temperature (temperature tuning) in the single-mode lasing regime was 0.56 nm / K.

scholarly journals Исследование спектров генерации арочных квантово-каскадных лазеров

2020 ◽  
Vol 128 (6) ◽  
pp. 696
Author(s):  
А.В. Бабичев ◽  
Д.А. Пашнев ◽  
Д.В. Денисов ◽  
А.Г. Гладышев ◽  
Ю.К. Бобрецова ◽  
...  
Keyword(s):  
Molecular Beam ◽  
Quantum Cascade Lasers ◽  
Single Mode ◽  
Lasing Wavelength ◽  
Quantum Cascade ◽  
Mode Suppression ◽  
Ring Diameter ◽  
Solid Alloys ◽  
Cascade Lasers ◽  
Side Mode

The results of studying the temperature characteristics of arched quantum-cascade lasers of 7-8 μm spectral range with different geometric sizes are presented. Laser heterostructure was grown by molecular beam epitaxy. The active region consisted of 50 cascades based on heteropairs of solid alloys In0.53Ga0.47As/Al0.48In0.52As. Single-mode lasing was demonstrated for lasers with a half-ring diameter of 100 μm and a length of linear section of 1 mm. The maximum side-mode suppression ratio at a temperature of 290 K was 26 dB, the lasing wavelength was 7.73 μm.

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