Flow and thermal field investigation of rarefied gas in a trapezoidal micro/nano-cavity using DSMC

2021 ◽  
pp. 2150162
Author(s):  
Mostafa Zakeri ◽  
Ehsan Roohi
Keyword(s):  
Knudsen Number ◽  
Thermal Field ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Field Investigation ◽  
Gas Flows ◽  
Fourier Law ◽  
Rarefied Gas Flows ◽  
Knudsen Numbers ◽  
Simulation Monte Carlo

The impetus of the this study is to investigate flow and thermal field in rarefied gas flows inside a trapezoidal micro/nano-cavity using the direct simulation Monte Carlo (DSMC) technique. The investigation covers the hydrodynamic properties and thermal behavior of the flow. The selected Knudsen numbers for this study are arranged in the slip and transition regimes. The results show the center of the vortex location moves by variation in the Knudsen numbers. Also, as the Knudsen number increases, the non-dimensional shear stress increases, but the distribution deviates from a symmetrical profile. The cold to hot transfer, which is in contrast with the conventional Fourier law, is observed. We show that the heat transfer is affected by the second derivative of the velocity. By increasing the Knudsen number, the transferred heat through the walls decreases, but the contraction/expansion effects on the temperature in the corner of the cavity become higher.

Direct Simulation Monte Carlo Analysis of Rarefied Gas Flow Structures and Ventilation of Etching Gas in Magneto-Microwave Plasma Etching Reactors

2002 ◽  
Vol 124 (2) ◽  
pp. 476-482 ◽  
Author(s):  
Masato Ikegawa ◽  
Yoshihumi Ogawa ◽  
Ryoji Fukuyama ◽  
Tatehito Usui ◽  
Jun’ichi Tanaka
Keyword(s):  
Plasma Etching ◽  
Gas Flow ◽  
Microwave Plasma ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Gas Flows ◽  
Direct Simulation ◽  
Rarefied Gas Flows ◽  
Simulation Monte Carlo ◽  
Gas Supply

Gas flows in plasma etching reactors for semiconductor fabrication became a chief consideration in designing second-generation reactors with higher etching rates. An axisymmetrical model based on the direct simulation Monte Carlo method has been developed for analyzing rarefied gas flows in a vacuum chamber with the conditions of downstream pressure and gas flow rate. By using this simulator, rarefied gas flows with radicals and etch-products were calculated for microwave-plasma etching reactors. The results showed that the flow patterns in the plasma chamber strongly depend on the Knudsen number and the gas-supply structure. The ventilation of the etch-products in the plasma chamber was found to be improved both for higher Knudsen numbers and for gas-supply structures of the downward-flow type, as compared with those of the radial-flow or upward-flow types.

scholarly journals Rarefied gas flows through meshes and implications for atmospheric measurements

2001 ◽  
Vol 19 (5) ◽  
pp. 563-569 ◽  
Author(s):  
J. Gumbel
Keyword(s):  
Middle Atmosphere ◽  
Rarefied Gas ◽  
Direct Simulation Monte Carlo ◽  
Atmospheric Composition ◽  
Gas Flows ◽  
Atmospheric Measurements ◽  
Rarefied Gas Flows ◽  
Flow Disturbances ◽  
Composition And Structure ◽  
Compression Effects

Abstract. Meshes are commonly used as part of instruments for in situ atmospheric measurements. This study analyses the aerodynamic effect of meshes by means of wind tunnel experiments and numerical simulations. Based on the Direct Simulation Monte Carlo method, a simple mesh parameterisation is described and applied to a number of representative flow conditions. For open meshes freely exposed to the flow, substantial compression effects are found both upstream and downstream of the mesh. Meshes attached to close instrument structures, on the other hand, cause only minor flow disturbances. In an accompanying paper, the approach developed here is applied to the quantitative analysis of rocket-borne density measurements in the middle atmosphere.Key words. Atmospheric composition and structure (instruments and techniques; middle atmosphere – composition and chemistry)

DSMC Simulation of Rarefied Gas Flow Over a Wall Mounted Cube

2019 ◽  
Author(s):  
Deepak Nabapure ◽  
Ram Chandra Murthy
Keyword(s):  
Gas Flow ◽  
Rarefied Gas ◽  
Flow Behavior ◽  
Direct Simulation Monte Carlo ◽  
Temperature Fields ◽  
Gas Flows ◽  
Rarefied Gas Flows ◽  
Dsmc Simulation ◽  
Recirculation Length ◽  
Velocity Pressure

Abstract The present study investigates the flow behavior of the rarefied gas over a wall-mounted cube. The problem is studied for different cube heights (h) of 9mm and 18mm in the slip and transition regimes. The Direct Simulation Monte Carlo (DSMC) method is employed to evaluate the properties such as velocity, pressure and temperature fields. The Reynolds number (Re) ranges from 403 to 807, and the Knudsen number (Kn) is in the range from 0.05 to 0.103. A typical shock wave is formed in front of the cube. The recirculation length of the vortices normalized with respect to the respective cube heights for Kn = 0.05 and Kn = 0.103 are about 1.11 and 1.95 respectively. Similarly, the center of the vortices is located at about 3.33 and 6.11 times the respective cube heights upstream, for Kn = 0.05 and Kn = 0.103. The local temperature and pressure variations observed upstream of the cube are two orders higher in magnitude and are primarily attributed to strong compressibility effects. The present study paves the way for benchmarking, and forms a basis for understanding the rarefied gas flows over complex geometries.

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