Microfabricated metal oxide array sensor based on nanosized SnO–SnO2 sensitive material

2018 ◽  
Vol 32 (18) ◽  
pp. 1850199
Author(s):  
Jianhai Sun ◽  
Jinhua Liu ◽  
Chunxiu Liu ◽  
Wen Wang ◽  
Junhong Li ◽  
...  

In this work, a microfabricated metal oxide (MOX) array sensor based on nanosized SnO–SnO2 sensitive material was proposed. To maximize detection response and reduce power consumption, sensitive units supported by a multi-layer beam were suspended in center of micro reaction cell which could greatly improve thermal isolation. The sensitive units were fabricated with nanosized SnO–SnO2 sensitive material, and Au-doped sensitive material was proposed which was able to greatly increase selectivity and sensitivity of sensitive film. The results demonstrate that the sensitive unit has good specificity of benzene, and the MOX array sensor was able to detect benzene with an extremely low concentration, in which the lowest detectable concentration was less than 5 ppb.

Sensors ◽  
2019 ◽  
Vol 19 (17) ◽  
pp. 3719
Author(s):  
Wen-Jie Zhao ◽  
Dan Xu ◽  
Yin-Sheng Chen ◽  
Xuan Wang ◽  
Yun-Bo Shi

Air pollution is one of the major threats to human health. The monitoring of toxic NO2 gas in urban air emission pollution is becoming increasingly important. Thus, the development of an NO2 sensor with low power consumption, low cost, and high performance is urgent. In this paper, a planar structural micro hotplate gas sensor based on an AlN ceramic substrate with an annular Pt film heater was designed and prepared by micro-electro-mechanical system (MEMS) technology, in which Pt/Nb/In2O3 composite semiconductor oxide was used as the sensitive material with a molar ratio of In:Nb = 9:1. The annular thermal isolation groove was designed around the heater to reduce the power consumption and improve the thermal response rate. Furthermore, the finite element simulation analysis of the thermal isolation structure of the sensor was carried out by using ANSYS software. The results show that a low temperature of 94 °C, low power consumption of 150 mW, and low concentration detection of 1 to 10 ppm NO2 were simultaneously realized for the Nb-doped In2O3-based gas sensor. Our findings provide a promising strategy for the application of In2O3-based sensors in highly effective and low concentration NO2 detection.


2014 ◽  
Vol E97.B (12) ◽  
pp. 2698-2705
Author(s):  
Tomoyuki HINO ◽  
Hitoshi TAKESHITA ◽  
Kiyo ISHII ◽  
Junya KURUMIDA ◽  
Shu NAMIKI ◽  
...  

2014 ◽  
Vol 136 (6) ◽  
Author(s):  
Mathias Beer ◽  
Yves-Simon Gloy ◽  
Mohit Raina ◽  
Thomas Gries

The crochet knitting machine is a warp knitting machine with a weft insertion system placed on a weft guide bar. On standard machines, the weft guide bar is made from aluminum and weighs about 570 g. The single-drive motors, which power the bar, account for 15–20% of the machines total power consumption. The aim of this research was to reduce power consumption by decreasing the mass of the weft guide bar. This was done by constructing the bar from carbon fiber reinforced plastics rather than aluminum, resulting in a mass saving of 260 g.


Sign in / Sign up

Export Citation Format

Share Document