Infrared Absorption Efficiency Enhancement of the CMOS Compatible Thermopile by the Special Subwavelength Hole Arrays

The infrared absorption efficiency (IAE) enhancement of the complementary-metal-oxide-semiconductorCMOS compatible thermopile with special subwavelength hole arrays in an active area was numerically investigated by the finite-difference time-domain method. It was found that the absorption efficiency of that thermopile was enhanced when the subwavelength rectangular-hole array added extra rectangular-columnar or ellipse-columnar structures in the hole array. The simulation results show that the IAEs of the better cases for the three types of rectangular columns and three ellipse columns were increased by 14.4% and 15.2%, respectively. Such special subwavelength hole arrays can be improved by the IAE of the CMOS compatible thermopile.

Download Full-text

Enhanced Infrared Absorbance of the CMOS Compatible Thermopile by the Subwavelength Rectangular-Hole Arrays

Sensors ◽

10.3390/s20113218 ◽

2020 ◽

Vol 20 (11) ◽

pp. 3218 ◽

Cited By ~ 1

Author(s):

Chi-Feng Chen ◽

Chih-Hsiung Shen ◽

Yun-Ying Yeh

Keyword(s):

Fdtd Method ◽

Complementary Metal Oxide Semiconductor ◽

Absorption Efficiency ◽

Oxide Semiconductor ◽

Fdtd Simulation ◽

Target Temperature ◽

Rectangular Hole ◽

Geometric Conditions ◽

Cmos Compatible ◽

Hole Arrays

The enhanced infrared absorbance (IRA) of the complementary metal-oxide-semiconductor (CMOS) compatible thermopile with the subwavelength rectangular-hole arrays in active area is investigated. The finite-difference time-domain (FDTD) method considered and analyzed the matrix arrangement (MA) and staggered arrangement (SA) of subwavelength rectangular-hole arrays (SRHA). For the better cases of MA-SRHA and SA-SRHA, the geometric parameters are the same and the infrared absorption efficiency (IAE) of the SA type is better than that of the MA type by about 19.4% at target temperature of 60 °C. Three proposed thermopiles with SA-SRHA are manufactured based on the 0.35 μm 2P4M CMOS-MEMS process. The measurement results are similar to the simulation results. The IAE of the best simulation case of SA-SRHA is up to 3.3 times higher than that without structure at the target temperature of 60 °C. Obviously, the staggered rectangular-hole arrays with more appropriate geometric conditions obtained from FDTD simulation can excellently enhance the IRA of the CMOS compatible thermopile.

Download Full-text

LIGHT PROPAGATING IN METAL SUB-WAVELENGTH-HOLE ARRAYS

NANO ◽

10.1142/s1793292010002207 ◽

2010 ◽

Vol 05 (05) ◽

pp. 295-300 ◽

Cited By ~ 1

Author(s):

YONGAN TANG ◽

BRANISLAV VLAHOVIC ◽

DAVID J. BRADY

Keyword(s):

Finite Difference Time Domain ◽

Gold Film ◽

Light Transmission ◽

Hole Array ◽

Thin Gold Film ◽

Metallic Structures ◽

Hole Arrays ◽

Difference Time ◽

Plasmon Polaritons ◽

Sub Wavelength

We investigate the light propagating through a sub-wavelength-hole array in a thin gold film. The extraordinary light transmission (ELT) of the metallic array is observed. This ELT is due to the localized plasmon polaritons, whose production are dependent on the polarization of the light, the periodicity of the array, the features of the hole, and the thickness of the gold film. These parameters of the metallic structures are investigated through the finite difference time domain method. It is possible to obtain a desired transmission spectrum from the sub-wavelength-hole array by designing these parameters.

Download Full-text

A Thermopile Device with Sub-Wavelength Hole Arrays by CMOS-MEMS Technology

Sensors ◽

10.3390/s21010180 ◽

2020 ◽

Vol 21 (1) ◽

pp. 180

Author(s):

Chi-Feng Chen ◽

Chih-Hsiung Shen ◽

Yun-Ying Yeh

Keyword(s):

Fdtd Method ◽

Elliptical Hole ◽

Oxide Semiconductor ◽

Active Area ◽

Hole Array ◽

Cmos Mems ◽

Simulation Results ◽

Hole Arrays ◽

Hole Structure ◽

Sub Wavelength

A thermopile device with sub-wavelength hole array (SHA) is numerically and experimentally investigated. The infrared absorbance (IRA) effect of SHAs in active area of the thermopile device is clearly analyzed by the finite-difference time-domain (FDTD) method. The prototypes are manufactured by the 0.35 μm 2P4M complementary metal-oxide-semiconductor micro-electro-mechanical-systems (CMOS-MEMS) process in Taiwan semiconductor manufacturing company (TSMC). The measurement results of those prototypes are similar to their simulation results. Based on the simulation technology, more sub-wavelength hole structural effects for IRA of such thermopile device are discussed. It is found from simulation results that the results of SHAs arranged in a hexagonal shape are significantly better than the results of SHAs arranged in a square and the infrared absorption efficiencies (IAEs) of specific asymmetric rectangle and elliptical hole structure arrays are higher than the relatively symmetric square and circular hole structure arrays. The overall best results are respectively up to 3.532 and 3.573 times higher than that without sub-wavelength structure at the target temperature of 60 °C when the minimum structure line width limit of the process is ignored. Obviously, the IRA can be enhanced when the SHAs are considered in active area of the thermopile device and the structural optimization of the SHAs is absolutely necessary.

Download Full-text

Strong Influence of Surface Structures on Enhanced Transmission through Subwavelength Hole Arrays

Japanese Journal of Applied Physics ◽

10.1143/jjap.44.l973 ◽

2005 ◽

Vol 44 (No. 30) ◽

pp. L973-L975 ◽

Cited By ~ 3

Author(s):

Kunihiko Ishihara ◽

Keishi Ohashi

Keyword(s):

Strong Influence ◽

Surface Structures ◽

Enhanced Transmission ◽

Subwavelength Hole Arrays ◽

Hole Arrays

Download Full-text

Electrically tunable terahertz switch based on superconducting subwavelength hole arrays

Applied Optics ◽

10.1364/ao.435569 ◽

2021 ◽

Author(s):

Chun Li ◽

Ling Jiang ◽

Qingxiao Ma ◽

Yan Teng ◽

Rui Bian ◽

...

Keyword(s):

Subwavelength Hole Arrays ◽

Hole Arrays

Download Full-text

Optical transmission through double-layer, laterally shifted metallic subwavelength hole arrays

Optics Letters ◽

10.1364/ol.35.002124 ◽

2010 ◽

Vol 35 (13) ◽

pp. 2124 ◽

Cited By ~ 14

Author(s):

Z. Marcet ◽

Z. H. Hang ◽

C. T. Chan ◽

I. Kravchenko ◽

J. E. Bower ◽

...

Keyword(s):

Double Layer ◽

Optical Transmission ◽

Subwavelength Hole Arrays ◽

Hole Arrays

Download Full-text

The influence of hole shape on enhancing transmission through subwavelength hole arrays

Chinese Physics ◽

10.1088/1009-1963/15/7/036 ◽

2006 ◽

Vol 15 (7) ◽

pp. 1591-1594 ◽

Cited By ~ 13

Author(s):

Sun Mei ◽

Liu Rong-Juan ◽

Li Zhi-Yuan ◽

Cheng Bing-Ying ◽

Zhang Dao-Zhong ◽

...

Keyword(s):

Hole Shape ◽

Subwavelength Hole Arrays ◽

Hole Arrays

Download Full-text

Subwavelength hole arrays with nanoapertures fabricated by scanning probe nanolithography

Science of Sintering ◽

10.2298/sos0602117j ◽

2006 ◽

Vol 38 (2) ◽

pp. 117-123 ◽

Cited By ~ 2

Author(s):

Z. Jaksic ◽

M. Maksimovic ◽

D. Vasiljevic-Radovic ◽

M. Sarajlic

Keyword(s):

Building Blocks ◽

Scanning Probe ◽

Positive Photoresist ◽

Force Microscopy ◽

Atomic Force ◽

Optical Effects ◽

Different Shapes ◽

Subwavelength Hole Arrays ◽

Hole Arrays ◽

Electromagnetic Transmission

Owing to their surface plasmon-based operation, arrays of subwavelength holes show extraordinary electromagnetic transmission and intense field localizations of several orders of magnitude. Thus they were proposed as the basic building blocks for a number of applications utilizing the enhancement of nonlinear optical effects. We designed and simulated nanometer-sized subwavelength holes using an analytical approach. In our experiments we used the scanning probe method for nanolithographic fabrication of subwavelength hole arrays in silver layers sputtered on a positive photoresist substrate. We fabricated ordered nanohole patterns with different shapes, dispositions and proportions. The smallest width was about 60 nm. We characterized the fabricated samples by atomic force microscopy.

Download Full-text