Annealing Effect on Hydrogenated Amorphous Silicon Films Prepared at High Deposition-Rate by Substrate Impedance Tuning Technique
1985 ◽
Vol 24
(Part 1, No. 7)
◽
pp. 795-799
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1986 ◽
Vol 25
(Part 1, No. 8)
◽
pp. 1148-1151
◽
1984 ◽
Vol 23
(Part 2, No. 2)
◽
pp. L81-L82
◽
1985 ◽
Vol 24
(Part 2, No. 6)
◽
pp. L428-L430
◽
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