Structure and Properties of Germanium Carbide Films Prepared by RF Reactive Sputtering inAr/CH4
1997 ◽
Vol 36
(Part 1, No. 6A)
◽
pp. 3625-3628
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2019 ◽
Vol 37
(5)
◽
pp. 051508
◽
1993 ◽
Vol 228
(1-2)
◽
pp. 238-241
◽
2008 ◽
Vol 49
(9)
◽
pp. 2082-2090
◽
Keyword(s):
1999 ◽
Vol 17
(5)
◽
pp. 2850-2858
◽
2003 ◽
Vol 174-175
◽
pp. 261-265
◽
1999 ◽
Vol 17
(5)
◽
pp. 2859-2868
◽
2001 ◽
Vol 173
(1-2)
◽
pp. 84-90
◽
1991 ◽
Vol 49
◽
pp. 576-577
Keyword(s):
1987 ◽
Vol 45
◽
pp. 440-443