Uniform RF Discharge Plasmas Produced by a Square Hollow Cathode with Tapered Shape
1998 ◽
Vol 37
(Part 2, No. 1A/B)
◽
pp. L81-L84
◽
2006 ◽
Vol 45
(11)
◽
pp. 8883-8889
◽
Keyword(s):
2010 ◽
Vol 50
(6-7)
◽
pp. 520-528
◽
2000 ◽
Vol 34
(1)
◽
pp. 95-104
◽
Keyword(s):
2009 ◽
Vol 35
(10)
◽
pp. 852-859
◽