Uniform RF Discharge Plasmas Produced by a Square Hollow Cathode with Tapered Shape

1998 ◽  
Vol 37 (Part 2, No. 1A/B) ◽  
pp. L81-L84 ◽  
Author(s):  
Taichi Fukuda ◽  
Akio Matsuoka ◽  
Yoshiomi Kondoh ◽  
Minoru Sugawara
2007 ◽  
Vol 90 (20) ◽  
pp. 201501 ◽  
Author(s):  
K. Baba ◽  
T. Kaneko ◽  
R. Hatakeyama

2010 ◽  
Vol 518 (22) ◽  
pp. 6682-6685 ◽  
Author(s):  
Yun-Seong Lee ◽  
Hun-Su Lee ◽  
Hong-Young Chang

1996 ◽  
Vol 36 (2) ◽  
pp. 133-145 ◽  
Author(s):  
V.V Chechkin ◽  
I.P Fomin ◽  
L.I Grigor`eva ◽  
A.P Litvinov ◽  
N.I Nazarov ◽  
...  

2010 ◽  
Vol 50 (6-7) ◽  
pp. 520-528 ◽  
Author(s):  
I.M. Pankratov ◽  
A.A. Beletskii ◽  
V.L. Berezhnyj ◽  
P.Ya. Burchenko ◽  
V.V. Chechkin ◽  
...  

2009 ◽  
Vol 35 (10) ◽  
pp. 852-859 ◽  
Author(s):  
V. V. Chechkin ◽  
L. I. Grigor’eva ◽  
Ye. L. Sorokovoy ◽  
E. L. Sorokovoy ◽  
A. A. Beletskii ◽  
...  

1993 ◽  
Vol 62 (6) ◽  
pp. 567-569 ◽  
Author(s):  
N. Sato ◽  
S. Iizuka ◽  
T. Koizumi ◽  
T. Takada

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