Molecular Beam Epitaxial Growth of GaN on (0001) Al2O3Using an Ultrathin Amorphous Buffer Layer Deposited at Low Temperature

2000 ◽  
Vol 39 (Part 1, No. 3A) ◽  
pp. 1039-1043 ◽  
Author(s):  
Ryuhei Kimura ◽  
Kiyoshi Takahashi
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Buffer Layer ◽  
Molecular Beam ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth

Mechanisms of Molecular Beam Epitaxial Growth on Reconstructed Si{100}: Thermal and Energized Beams

1988 ◽  
Vol 141 ◽  
Author(s):  
B. J. Garrison ◽  
M. T. Miller ◽  
D.W. Brenner
Keyword(s):  
Molecular Dynamics ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Gas Phase ◽  
Molecular Beam ◽  
Energy Deposition ◽  
Amorphous Structure ◽  
Molecular Beam Epitaxial ◽  
Dynamics Simulations ◽  
Molecular Beam Epitaxial Growth

Summary:Molecular dynamics simulations have been performed that examine the microscopic mechanisms of rearrangements of atoms on the Si{ 1001 surface due to deposition of gas phase atoms. For thermal energy deposition we find that the gas atoms initially attach to dangling bonds of the surface dimer atoms. The dimer ’unreconstruction’ is due to a diffusion event on the surface, thus is temperature activated. We also find that dimers may open in regions of the surface where there are several atoms not at lattice sites, thus a low temperature amorphous structure. For 5-10 eV deposition there are direct mechanisms of dimer opening that occur on the 50-100 fs timescale. For energies greater than 15-20 eV there is implantation of the silicon atoms which leads to subsurface damage.

scholarly journals LOW TEMPERATURE MOLECULAR BEAM EPITAXIAL GROWTH OF Bi CUPRATES

1992 ◽  
Vol 4 (2) ◽  
pp. 158-163,f2
Author(s):  
Maki KAWAI ◽  
Akihisa YANASE ◽  
Masami MORI ◽  
Nobuo ISHIZAWA ◽  
Masahiro KUDO
Keyword(s):  
Low Temperature ◽  
Epitaxial Growth ◽  
Molecular Beam ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth

Low temperature molecular beam epitaxial growth of DyBaCuO superconducting thin films

1994 ◽  
Vol 64 (15) ◽  
pp. 2031-2033 ◽  
Author(s):  
V. V. Mamutin ◽  
N. F. Kartenko ◽  
S. I. Goloschapov ◽  
V. V. Tretjakov ◽  
P. S. Kop’ev
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Epitaxial Growth ◽  
Molecular Beam ◽  
Superconducting Thin Films ◽  
Molecular Beam Epitaxial ◽  
Molecular Beam Epitaxial Growth
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