Preparation and Characterization of Epitaxial Lead Zirconate Titanate Films on Pt/(Ti, Al)N/TiN/Si Substrates by Metalorganic Chemical Vapor Deposition

2000 ◽  
Vol 39 (Part 1, No. 9B) ◽  
pp. 5441-5445 ◽  
Author(s):  
Atsushi Sakurai ◽  
Xio Min Li ◽  
Kohsuke Shiratsuyu ◽  
Katsuhiko Tanaka ◽  
Yukio Sakabe
1987 ◽  
Vol 62 (3) ◽  
pp. 862-867 ◽  
Author(s):  
S. J. Pearton ◽  
S. M. Vernon ◽  
C. R. Abernathy ◽  
K. T. Short ◽  
R. Caruso ◽  
...  

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