Transport of Gas-Phase Species Stored in Stagnant Volumes under a GaN Metalorganic Vapor Phase Epitaxy Horizontal Reactor

Vapor Phase Epitaxy ◽

Horizontal Reactor

Complex Flow and Gas-Phase Reactions in a Horizontal Reactor for GaN Metalorganic Vapor Phase Epitaxy

Japanese Journal of Applied Physics ◽

10.1143/jjap.39.6180 ◽

2000 ◽

Vol 39 (Part 1, No. 11) ◽

pp. 6180-6190 ◽

Cited By ~ 11

Author(s):

Kenji Harafuji ◽

Yoshiaki Hasegawa ◽

Akihiko Ishibashi ◽

Ayumu Tsujimura ◽

Isao Kidoguchi ◽

...

Keyword(s):

Gas Phase ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Complex Flow ◽

Gas Phase Reactions ◽

Horizontal Reactor

Study of the gas phase chemistry in the silicon doping of GaAs grown by metalorganic vapor phase epitaxy using tertiarybutylarsine as the group V source

10.1016/0022-0248(94)90130-9 ◽

1994 ◽

Vol 135 (3-4) ◽

pp. 423-433 ◽

Cited By ~ 13

Author(s):

J.M. Redwing ◽

T.F. Kuech ◽

D. Saulys ◽

D.F. Gaines

Keyword(s):

Gas Phase ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Silicon Doping ◽

Group V ◽

Gas Phase Chemistry ◽

Phase Chemistry

Role of gas‐phase adducts in the growth of gallium arsenide by metalorganic vapor‐phase epitaxy

Applied Physics Letters ◽

10.1063/1.110373 ◽

1993 ◽

Vol 63 (2) ◽

pp. 214-215 ◽

Cited By ~ 10

Author(s):

Douglas F. Foster ◽

Christopher Glidewell ◽

David J. Cole‐Hamilton

Keyword(s):

Gallium Arsenide ◽

Gas Phase ◽

Vapor Phase ◽

Vapor Phase Epitaxy

Monitoring of gas-phase species in metalorganic vapor phase epitaxy by fiber-optics based Fourier transform infrared spectroscopy

10.1016/0022-0248(94)91025-1 ◽

1994 ◽

Vol 145 (1-4) ◽

pp. 28-35 ◽

Cited By ~ 13

Author(s):

Sateria Salim ◽

K.F. Jensen ◽

R.D. Driver

Keyword(s):

Fourier Transform ◽

Infrared Spectroscopy ◽

Gas Phase ◽

Fourier Transform Infrared Spectroscopy ◽

Fiber Optics ◽

Vapor Phase ◽

Fourier Transform Infrared ◽

Vapor Phase Epitaxy

Factors Determining the Generation of Polycrystalline Growth over Masks in Selective-Area Metalorganic Vapor Phase Epitaxy: Gas-Phase Concentration Analysis

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l359 ◽

2003 ◽

Vol 42 (Part 2, No. 4A) ◽

pp. L359-L361 ◽

Cited By ~ 8

Author(s):

Ho-jin Oh ◽

Masakazu Sugiyama ◽

Yoshiaki Nakano ◽

Yukihiro Shimogaki

Keyword(s):

Gas Phase ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Selective Area ◽

Phase Concentration

Gas-phase nanoparticle formation during AlGaN metalorganic vapor phase epitaxy

Applied Physics Letters ◽

10.1063/1.1510580 ◽

2002 ◽

Vol 81 (14) ◽

pp. 2626-2628 ◽

Cited By ~ 42

Author(s):

J. R. Creighton ◽

W. G. Breiland ◽

M. E. Coltrin ◽

R. P. Pawlowski

Keyword(s):

Gas Phase ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Nanoparticle Formation

Effect of gas phase temperature on InGaN grown by metalorganic vapor phase epitaxy

10.1016/j.jcrysgro.2018.12.007 ◽

2019 ◽

Vol 509 ◽

pp. 50-53 ◽

Cited By ~ 1

Author(s):

Zhibin Liu ◽

Shugo Nitta ◽

Shigeyoshi Usami ◽

Yoann Robin ◽

Maki Kushimoto ◽

...

Keyword(s):

Gas Phase ◽

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Phase Temperature

Density functional theory study on surface adsorptions in AlN metalorganic vapor phase epitaxy process

Applied Surface Science ◽

10.1016/j.apsusc.2020.148773 ◽

2021 ◽

Vol 544 ◽

pp. 148773

Author(s):

Peng Lin ◽

Nannan Niu ◽

Ran Zuo ◽

Yulong Fang ◽

Zhihong Feng

Keyword(s):

Density Functional Theory ◽

Vapor Phase ◽

Density Functional ◽

Vapor Phase Epitaxy ◽

Density Functional Theory Study ◽

Functional Theory

Selective-area growth and characterization of cubic GaN grown by metalorganic vapor phase epitaxy

Thin Solid Films ◽

10.1016/j.tsf.2020.138125 ◽

2020 ◽

Vol 709 ◽

pp. 138125

Author(s):

Pattana Suwanyangyaun ◽

Sakuntam Sanorpim ◽

Kentaro Onabe

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Selective Area Growth ◽

Selective Area ◽

Area Growth ◽

Cubic Gan

Acceptor doping of (Al,Ga)As using carbon by metalorganic vapor phase epitaxy

10.1016/0022-0248(91)90469-l ◽

1991 ◽

Vol 107 (1-4) ◽

pp. 268-273 ◽

Cited By ~ 17

Author(s):

M.A. Tischler ◽

R.M. Potemski ◽

T.F. Kuech ◽

F. Cardone ◽

M.S. Goorsky ◽

...

Keyword(s):

Vapor Phase ◽

Vapor Phase Epitaxy ◽

Acceptor Doping