Complex Flow and Gas-Phase Reactions in a Horizontal Reactor for GaN Metalorganic Vapor Phase Epitaxy

2000 ◽  
Vol 39 (Part 1, No. 11) ◽  
pp. 6180-6190 ◽  
Author(s):  
Kenji Harafuji ◽  
Yoshiaki Hasegawa ◽  
Akihiko Ishibashi ◽  
Ayumu Tsujimura ◽  
Isao Kidoguchi ◽  
...  
Keyword(s):  
Gas Phase ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Complex Flow ◽  
Gas Phase Reactions ◽  
Horizontal Reactor

Role of gas‐phase adducts in the growth of gallium arsenide by metalorganic vapor‐phase epitaxy

1993 ◽  
Vol 63 (2) ◽  
pp. 214-215 ◽  
Author(s):  
Douglas F. Foster ◽  
Christopher Glidewell ◽  
David J. Cole‐Hamilton
Keyword(s):  
Gallium Arsenide ◽  
Gas Phase ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy

Gas-phase nanoparticle formation during AlGaN metalorganic vapor phase epitaxy

2002 ◽  
Vol 81 (14) ◽  
pp. 2626-2628 ◽  
Author(s):  
J. R. Creighton ◽  
W. G. Breiland ◽  
M. E. Coltrin ◽  
R. P. Pawlowski
Keyword(s):  
Gas Phase ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Nanoparticle Formation

Effect of gas phase temperature on InGaN grown by metalorganic vapor phase epitaxy

2019 ◽  
Vol 509 ◽  
pp. 50-53 ◽  
Author(s):  
Zhibin Liu ◽  
Shugo Nitta ◽  
Shigeyoshi Usami ◽  
Yoann Robin ◽  
Maki Kushimoto ◽  
...  
Keyword(s):  
Gas Phase ◽  
Vapor Phase ◽  
Metalorganic Vapor Phase Epitaxy ◽  
Vapor Phase Epitaxy ◽  
Phase Temperature
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