Characterization of Argon Fast Atom Beam Source and Application to Mesa Etching Process for GaInP/GaAs Triple-Barrier Resonant Tunneling Diodes
2006 ◽
Vol 45
(6B)
◽
pp. 5504-5508
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Keyword(s):
Keyword(s):
1996 ◽
Vol 43
(2)
◽
pp. 332-341
◽
Keyword(s):