Characteristics of Cobalt Films Deposited by Metal Organic Chemical Vapor Deposition Method Using Dicobalt Hexacarbonyltert-Butylacetylene

2008 ◽  
Vol 47 (7) ◽  
pp. 5396-5399 ◽  
Author(s):  
Keunwoo Lee ◽  
Taeyong Park ◽  
Jaesang Lee ◽  
Jinwoo Kim ◽  
Jeongtae Kim ◽  
...  
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