Influence of Growth Parameters and Thickness of AlN Spacer on Electrical Properties of AlGaN/AlN/GaN High-Electron-Mobility Transistors Grown on 4-Inch Si Substrate

2009 ◽  
Vol 48 (11) ◽  
pp. 111002 ◽  
Author(s):  
Shuxin Tan ◽  
Takaaki Suzue ◽  
S. Lawrence Selvaraj ◽  
Takashi Egawa
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