Surface relaxation during plasma chemical vapor deposition of diamond-like carbon films, investigated by in-situ ellipsometry

1997 ◽  
Vol 308-309 ◽  
pp. 195-198 ◽  
Author(s):  
A von Keudell ◽  
T Schwarz-Selinger ◽  
W Jacob
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Surface Relaxation ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition

Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

2005 ◽  
Vol 44 (No. 52) ◽  
pp. L1573-L1575 ◽  
Author(s):  
Yoshimasa Kondo ◽  
Takao Saito ◽  
Tatsuya Terazawa ◽  
Masanori Saito ◽  
Naoto Ohtake
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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