scholarly journals Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure

2005 ◽  
Vol 71 (12) ◽  
pp. 1548-1552 ◽  
Author(s):  
Yoshimasa KONDO ◽  
Masanori SAITO ◽  
Takao SAITO ◽  
Naoto OHTAKE
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Subatmospheric Pressure ◽  
Plasma Chemical Vapor Deposition

Synthesis of Diamond-like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition at Subatmospheric Pressure

2004 ◽  
Vol 43 (No. 11A) ◽  
pp. L1406-L1408 ◽  
Author(s):  
Naoto Ohtake ◽  
Takao Saito ◽  
Yoshimasa Kondo ◽  
Shintaro Hosono ◽  
Yukinori Nakamura ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Subatmospheric Pressure ◽  
Plasma Chemical Vapor Deposition

Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

2005 ◽  
Vol 44 (No. 52) ◽  
pp. L1573-L1575 ◽  
Author(s):  
Yoshimasa Kondo ◽  
Takao Saito ◽  
Tatsuya Terazawa ◽  
Masanori Saito ◽  
Naoto Ohtake
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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