Metal-Assisted Chemical Etching Using Silica Nanoparticle for the Fabrication of a Silicon Nanowire Array

Surface-enhanced Raman spectroscopy (SERS) has advanced over the last four decades and has become an attractive tool for highly sensitive analysis in fields such as medicine and environmental monitoring. Recently, there has been an urgent demand for reusable and long-lived SERS substrates as a means of reducing the costs associated with this technique To this end, we fabricated a SERS substrate comprising a silicon nanowire array coated with silver nanoparticles, using metal-assisted chemical etching followed by photonic reduction. The morphology and growth mechanism of the SERS substrate were carefully examined and the performance of the fabricated SERS substrate was tested using rhodamine 6G and dopamine hydrochloride. The data show that this new substrate provides an enhancement factor of nearly 1 × 108. This work demonstrates that a silicon nanowire array coated with silver nanoparticles is sensitive and sufficiently robust to allow repeated reuse. These results suggest that this newly developed technique could allow SERS to be used in many commercial applications.

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Preparation of a Diameter-controlled Silicon Nanowire Array by Metal Assisted Chemical Etching using Silica Nanoparticles (MACES)

10.7567/ssdm.2011.l-9-5 ◽

2011 ◽

Author(s):

S. Kato ◽

Y. Watanabe ◽

Y. Kurokawa ◽

A. Yamada ◽

Y. Ohta ◽

...

Keyword(s):

Silica Nanoparticles ◽

Chemical Etching ◽

Silicon Nanowire ◽

Nanowire Array ◽

Silicon Nanowire Array ◽

Metal Assisted Chemical Etching

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Flexible Pressure Sensors Based on Silicon Nanowire Array Built by Metal-Assisted Chemical Etching

IEEE Electron Device Letters ◽

10.1109/led.2020.3001977 ◽

2020 ◽

Vol 41 (8) ◽

pp. 1233-1236

Author(s):

Chihoon Kim ◽

Heejo Ahn ◽

Taeksoo Ji

Keyword(s):

Chemical Etching ◽

Silicon Nanowire ◽

Nanowire Array ◽

Pressure Sensors ◽

Silicon Nanowire Array ◽

Metal Assisted Chemical Etching ◽

Flexible Pressure Sensors

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Ordered silicon nanowire array based solar cells produced by metal assisted chemical etching

2010 IEEE Photinic Society's 23rd Annual Meeting ◽

10.1109/photonics.2010.5699090 ◽

2010 ◽

Author(s):

Winston Chern ◽

Ki Jun Yu ◽

Debashis Chanda ◽

Jae Cheol Shin ◽

John A. Rogers ◽

...

Keyword(s):

Solar Cells ◽

Chemical Etching ◽

Silicon Nanowire ◽

Nanowire Array ◽

Silicon Nanowire Array ◽

Metal Assisted Chemical Etching

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A Systematic Study of Metal-assisted Chemical Etching Parameters for Well-Ordered Silicon Nanowire Array Fabrication

MRS Proceedings ◽

10.1557/opl.2012.41 ◽

2012 ◽

Vol 1408 ◽

Author(s):

Arif S. Alagoz ◽

Tansel Karabacak

Keyword(s):

Silicon Nanowires ◽

Chemical Etching ◽

Crystalline Silicon ◽

Silicon Nanowire ◽

Etching Rate ◽

Nanowire Array ◽

Lithium Ion ◽

Nanowire Diameter ◽

Silicon Nanowire Array ◽

Metal Assisted Chemical Etching

ABSTRACTMetal-assisted chemical etching is a simple and low-cost silicon nanowire fabrication method which allows control of nanowire diameter, length, shape and orientation. In this work, we fabricated well-ordered silicon nanowire array by patterning gold thin film by nanosphere lithography and etching single crystalline silicon wafer by metal-assisted chemical etching technique. We investigated relation between etched solution concentration and nanowire morphology, wafer crystal orientation, etching rate. This well-ordered silicon nanowires arrays have the potential applications in many fields but especially next generation energy related applications from solar cells to lithium-ion batteries.

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